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Dennis S. Grimard

Applied Materials

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Publication

Featured researches published by Dennis S. Grimard.

Archive | 1997

Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same

Dennis S. Grimard; Vijay D. Parkhe; Hyman J. Levinstein; Fusen Chen; Michael G. Chafin

Archive | 1997

High density plasma process chamber

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; Dennis S. Grimard; Jonathan D. Mohn; Michael G. Chafin; Kenneth S. Collins

Archive | 1997

Electrostatic chuck having improved gas conduits

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

Archive | 1997

Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners

Kenneth S. Collins; Michael R. Rice; Douglas A. Buchberger; Craig A. Roderick; Eric Askarinam; Gerhard Schneider; John Trow; Joshua Tsui; Dennis S. Grimard; Gerald Zheyao Yin; Robert W. Wu

Archive | 1999

Electrostatic chuck having gas cavity and method

Arnold Kholodenko; Shamouil Shamouilian; You Wang; Wing L. Cheng; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Ananda H. Kumar

Archive | 2004

Plasma control using dual cathode frequency mixing

Steven Shannon; Dennis S. Grimard; Theodoros Panagopoulos; Daniel J. Hoffman; Michael G. Chafin; Troy S. Detrick; Alexander Paterson; Jingbao Liu; Taeho Shin; Bryan Pu

Archive | 1997

Plasma chamber support having an electrically coupled collar ring

Craig A. Roderick; Dennis S. Grimard

Archive | 2001

Electrostatic chuck bonded to base with a bond layer and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 1999

Chuck having pressurized zones of heat transfer gas

Shamouil Shamouilian; Arnold Kholodenko; Siamak Salimian; Hamid Noorbakhsh; Efrain Quiles; Dennis S. Grimard

Archive | 2002

Electrostatic chuck having composite dielectric layer and method of manufacture

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard

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Arnold Kholodenko

Applied Materials

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Shamouil Shamouilian

Applied Materials

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Alexander M. Veytser

Applied Materials

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Ananda H. Kumar

Applied Materials

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Kadthala R. Narendrnath

Applied Materials

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Michael G. Chafin

Applied Materials

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Semyon L. Kats

Applied Materials

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Kenneth S. Collins

Applied Materials

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Wing L. Cheng

Applied Materials

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Steven Shannon

North Carolina State University

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