Lhacene Adnane

Modeling of Thermoelectric Effects in Phase Change Memory Cells

Thermoelectric effects on phase change memory elements are computationally analyzed through 2-D rotationally symmetric finite-element simulations of reset operation on a Ge2Sb2Te5 (GST) mushroom cell with 10-nm critical dimension. Temperature-dependent material parameters are used to determine the thermoelectric contributions at the junctions (Peltier heat) and within GST (Thomson heat). Thermal boundary resistances at the GST interfaces enhance the Peltier heat contribution. Peak current densities and thermal gradients are in the order of 250 MA/cm2 and 50 K/nm. Overall, thermoelectric effects are shown to introduce significant voltage polarity dependence on the operation dynamics, peak temperatures, thermal gradients, volume of the molten region, energy required, and resistance contrast. Resistance contrasts of ~ 8.8 × 103 were realized with 155 μA for the positive polarity and 245 μA for the negative polarity.

Electrical Resistivity of Liquid

The electrical resistivity of liquid Ge2Sb2 Te5 (GST) is obtained from dc-voltage measurements performed on thin GST films as well as from device-level microsecond-pulse voltage and current measurements performed on two arrays (thicknesses: 20 ± 2 nm and 50 ± 5 nm) of lithographically defined encapsulated GST nano-/microwires (length: 315 to 675 nm; width: 60 to 420 nm) with metal contacts. The thin-film measurements yield 1.26 ±0.15 mΩ·cm (thicknesses: 50, 100, and 200 nm); however, there is significant uncertainty regarding the integrity of the film in liquid state. The device-level measurements utilize the melting of the encapsulated structures by a single voltage pulse while monitoring the current through the wire. The melting is verified by the stabilization of the current during the pulse. The resistivity of liquid GST is extracted as 0.31 ± 0.04 and 0.21 ±0.03 mΩ·cm from 20- and 50-nm-thick wire arrays.

\hbox{Ge}_{2} \hbox{Sb}_{2}\hbox{Te}_{5}

We have developed an automated setup for simultaneous measurement of Seebeck coefficient S(T) and electrical resistivity ρ(T) of thin film samples from room temperature to ∼650 °C. S and ρ are extracted from current-voltage (I-V) measurements obtained using a semiconductor parameter analyzer and temperature measurements obtained using commercial thermocouples. The slope and the x-axis intercept of the I-V characteristics represent the sample conductance G and the Seebeck voltage, respectively. The measured G(T) can be scaled to ρ(T) by the geometry factor obtained from the room temperature resistivity measurement of the film. The setup uses resistive or inductive heating to control the temperature and temperature gradient on the sample. Inductive heating is achieved with steel plates that surround the test area and a water cooled copper pipe coil underneath that generates an AC magnetic field. The measurements can be performed using resistive heating only or inductive heating only, or a combination of both depending on the desired heating ranges. Inductive heating provides a more uniform heating of the test area, does not require contacts to the sample holder, can be used up to the Curie temperature of the particular magnetic material, and the temperature gradients can be adjusted by the relative positions of the coil and sample. Example results obtained for low doped single-crystal silicon with inductive heating only and with resistive heating only are presented.

Based on Thin-Film and Nanoscale Device Measurements

Atmospheric pressure ZnO microplasmas have been generated by high amplitude single pulses and DC voltages applied using micrometer-separated probes on ZnO nanoforests. The high voltage stress triggers plasma breakdown and breakdown in the surrounding air followed by sublimation of ZnO resulting in strong blue and white light emission with sharp spectral lines and non-linear current-voltage characteristics. The nanoforests are made of ZnO nanorods (NRs) grown on fluorine doped tin oxide (FTO) glass, poly-crystalline silicon and bulk p-type silicon substrates. The characteristics of the microplasmas depend strongly on the substrate and voltage parameters. Plasmas can be obtained with pulse durations as short as ∼1 μs for FTO glass substrate and ∼100 ms for the silicon substrates. Besides enabling plasma generation with shorter pulses, NRs on FTO glass substrate also lead to better tunability of the operating gas temperature. Hot and cold ZnO microplasmas have been observed with these NRs on FTO glass substr...

High temperature setup for measurements of Seebeck coefficient and electrical resistivity of thin films using inductive heating

Temperature-dependent electrical resistivity, ρ(T), and thermal conductivity, k(T), of nanocrystalline silicon microwires self-heated to melt are extracted by matching simulated current-voltage (I-V) characteristics to experimental I-V characteristics. Electrical resistivity is extracted from highly doped p-type wires on silicon dioxide in which the heat losses are predominantly to the substrate and the self-heating depends mainly on ρ(T) of the wires. The extracted ρ(T) decreases from 11.8 mΩ cm at room-temperature to 5.2 mΩ cm at 1690 K, in reasonable agreement with the values measured up to ∼650 K. Electrical resistivity and thermal conductivity are extracted from suspended highly doped n-type silicon wires in which the heat losses are predominantly through the wires. In this case, measured ρ(T) (decreasing from 20.5 mΩ cm at room temperature to 12 mΩ cm at 620 K) is used to extract ρ(T) at higher temperatures (decreasing to 1 mΩ cm at 1690 K) and k(T) (decreasing from 30 W m−1 K−1 at room temperature ...

Atmospheric pressure microplasmas in ZnO nanoforests under high voltage stress

High-temperature characterization of the thermoelectric properties of chalcogenide Ge2Sb2Te5 (GST) is critical for phase change memory devices, which utilize self-heating to quickly switch between amorphous and crystalline states and experience significant thermoelectric effects. In this work, the electrical resistivity and Seebeck coefficient are measured simultaneously as a function of temperature, from room temperature to 600 °C, on 50 nm and 200 nm GST thin films deposited on silicon dioxide. Multiple heating and cooling cycles with increasingly maximum temperature allow temperature-dependent characterization of the material at each crystalline state; this is in contrast to continuous measurements which return the combined effects of the temperature dependence and changes in the material. The results show p-type conduction (S > 0), linear S(T), and a positive Thomson coefficient (dS/dT) up to melting temperature. The results also reveal an interesting linearity between dS/dT and the conduction activat...

Extraction of temperature dependent electrical resistivity and thermal conductivity from silicon microwires self-heated to melting temperature

We extend our finite-element model of nucleation, growth, and amorphization in phase-change memory devices to model discrete nucleation and grain boundaries, including the evolution of grains within fully crystalline material during long-term anneals. Electrothermal simulations of set and reset operations include a heat of crystallization model and an Arrhenius expression modeling thermionic emission at grain boundaries. Our simulations capture cycle-to-cycle variations due to stochastic nucleation and the interplay of crystallization, the formation of percolation paths, and thermal runaway.

High temperature electrical resistivity and Seebeck coefficient of Ge2Sb2Te5 thin films

Resistivity of metastable amorphous Ge2Sb2Te5 (GST) measured at device level show an exponential decline with temperature matching with the steady-state thin-film resistivity measured at 858 K (melting temperature). This suggests that the free carrier activation mechanisms form a continuum in a large temperature scale (300 K – 858 K) and the metastable amorphous phase can be treated as a super-cooled liquid. The effective activation energy calculated using the resistivity versus temperature data follow a parabolic behavior, with a room temperature value of 333 meV, peaking to ∼377 meV at ∼465 K and reaching zero at ∼930 K, using a reference activation energy of 111 meV (3kBT/2) at melt. Amorphous GST is expected to behave as a p-type semiconductor at Tmelt ∼ 858 K and transitions from the semiconducting-liquid phase to the metallic-liquid phase at ∼ 930 K at equilibrium. The simultaneous Seebeck (S) and resistivity versus temperature measurements of amorphous-fcc mixed-phase GST thin-films show linear S-T trends that meet S = 0 at 0 K, consistent with degenerate semiconductors, and the dS/dT and room temperature activation energy show a linear correlation. The single-crystal fcc is calculated to have dS/dT = 0.153 μV/K2 for an activation energy of zero and a Fermi level 0.16 eV below the valance band edge.