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Dive into the research topics where Makoto Shibuta is active.

Publication


Featured researches published by Makoto Shibuta.


Archive | 2005

Substrate-holding apparatus, exposure apparatus, and device manufacturing method

Makoto Shibuta


Archive | 2007

Maintenance method, exposure method and apparatus, and device manufacturing method

Yuichi Shibazaki; Takeyuki Mizutani; Go Ichinose; Makoto Shibuta


Archive | 2006

Substrate holding device, exposure device, exposure method, and device fabrication method

Takeyuki Mizutani; Yuichi Shibazaki; Makoto Shibuta


Archive | 2005

Substrate holding device, exposure apparatus, and device manufacturing method

Makoto Shibuta; Yuichi Yoshida; Hiroaki Takaiwa


Archive | 2005

SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD

Makoto Shibuta


Archive | 2008

Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method

Takeyuki Mizutani; Yuichi Shibazaki; Makoto Shibuta


Archive | 2005

Immersion exposure apparatus and device manufacturing method to detect if liquid on base member

Makoto Shibuta


Archive | 2013

IMMERSION EXPOSURE APPARATUS AND METHOD WITH DETECTION OF LIQUID ON MEMBERS OF THE APPARATUS

Makoto Shibuta


Archive | 2007

Wartungsverfahren, belichtungsverfahren und vorrichtung und bauelementeherstellungsverfahren

Yuichi Shibazaki; Takeyuki Mizutani; Go Ichinose; Makoto Shibuta


Archive | 2007

メンテナンス方法、露光方法及び装置、並びにデバイス製造方法

Yuichi Shibazaki; Takeyuki Mizutani; Go Ichinose; Makoto Shibuta

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