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Martin Jeff Salinas

Applied Materials

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Publication

Featured researches published by Martin Jeff Salinas.

Archive | 2010

DUAL MODE INDUCTIVELY COUPLED PLASMA REACTOR WITH ADJUSTABLE PHASE COIL ASSEMBLY

Samer Banna; Valentin N. Todorow; Kenneth S. Collins; Andrew Nguyen; Martin Jeff Salinas; Zhigang Chen; Ankur Agarwal; Anniruddha Pal; Tse-Chiang Wang; Shahid Rauf

Archive | 2011

TWIN CHAMBER PROCESSING SYSTEM

Ming Xu; Andrew Nguyen; Evans Lee; Jared Ahmad Lee; James P. Cruse; Corie Lynn Cobb; Martin Jeff Salinas; Anchel Sheyner; Ezra Robert Gold; John W. Lane

Archive | 2007

Method and apparatus for controlling gas flow to a processing chamber

Ezra Robert Gold; Richard Fovell; James P. Cruse; Jared Ahmad Lee; Bruno Geoffrion; Douglas A. Buchberger; Martin Jeff Salinas

Archive | 2005

Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction

Daniel J. Hoffman; Roger Alan Lindley; Michael C. Kutney; Martin Jeff Salinas; Hamid Tavassoli; Keiji Horioka; Douglas A. Buchberger

Archive | 2007

Integrated thermal unit having a shuttle with a temperature controlled surface

David H. Quach; Martin Jeff Salinas

Archive | 2010

Apparatus for radial delivery of gas to a chamber and methods of use thereof

Jared Ahmad Lee; Martin Jeff Salinas; Ankur Agarwal; Ezra Robert Gold; James P. Cruse; Aniruddha Pal; Andrew Nguyen

Archive | 2014

Film Deposition Using Spatial Atomic Layer Deposition Or Pulsed Chemical Vapor Deposition

Yu Lei; Srinivas Gandikota; Seshadri Ganguli; Bo Zheng; Rajkumar Jakkaraju; Martin Jeff Salinas; Benjamin Schmiege

Archive | 2008

Zone control heater plate for track lithography systems

Martin Jeff Salinas; David H. Quach

Archive | 2011

Process chambers having shared resources and methods of use thereof

Jared Ahmad Lee; James P. Cruse; Andrew Nguyen; Corie Lynn Cobb; Ming Xu; Martin Jeff Salinas; Anchel Sheyner

Archive | 2015

Plasma erosion resistant thin film coating for high temperature application

Vahid Firouzdor; Biraja P. Kanungo; Jennifer Y. Sun; Martin Jeff Salinas; Jared Ahmad Lee

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Jared Ahmad Lee

Applied Materials

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Andrew Nguyen

University of Utah

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James P. Cruse

Applied Materials

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Douglas A. Buchberger

Applied Materials

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Ezra Robert Gold

Applied Materials

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Anchel Sheyner

Applied Materials

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Aniruddha Pal

Applied Materials

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Daniel J. Hoffman

Applied Materials

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David H. Quach

Applied Materials

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Hamid Tavassoli

Applied Materials

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