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Ezra Robert Gold

Applied Materials

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Publication

Featured researches published by Ezra Robert Gold.

Archive | 2006

Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone

Kallol Bera; Xiaoye Zhao; Kenny L. Doan; Ezra Robert Gold; Paul Brillhart; Bruno Geoffrion; Bryan Pu; Daniel J. Hoffman

Archive | 2011

TWIN CHAMBER PROCESSING SYSTEM

Ming Xu; Andrew Nguyen; Evans Lee; Jared Ahmad Lee; James P. Cruse; Corie Lynn Cobb; Martin Jeff Salinas; Anchel Sheyner; Ezra Robert Gold; John W. Lane

Archive | 2007

Method and apparatus for controlling gas flow to a processing chamber

Ezra Robert Gold; Richard Fovell; James P. Cruse; Jared Ahmad Lee; Bruno Geoffrion; Douglas A. Buchberger; Martin Jeff Salinas

Archive | 2006

Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of selected chamber parameters

Daniel J. Hoffman; Ezra Robert Gold

Archive | 2006

Method to reduce plasma-induced charging damage

Michael C. Kutney; Daniel J. Hoffman; Gerardo A. Delgadino; Ezra Robert Gold; Ashok K. Sinha; Xiaoye Zhao; Douglas H. Burns; Shawming Ma

Archive | 2006

Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of plural chamber parameters

Daniel J. Hoffman; Ezra Robert Gold

Archive | 2006

Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas content

Kallol Bera; Xiaoye Zhao; Kenny L. Doan; Ezra Robert Gold; Paul Brillhart; Bruno Geoffrion; Bryan Pu; Daniel J. Hoffman

Archive | 2006

Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulation

Kallol Bera; Xiaoye Zhao; Kenny L. Doan; Ezra Robert Gold; Paul Brillhart; Bruno Geoffrion; Bryan Pu; Daniel J. Hoffman

Archive | 2006

Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones

Kallol Bera; Xiaoye Zhao; Kenny L. Doan; Ezra Robert Gold; Paul Brillhart; Bruno Geoffrion; Bryan Pu; Daniel J. Hoffman

Archive | 2006

Plasma etch process using polymerizing etch gases and an inert diluent gas in independent gas injection zones to improve etch profile or etch rate uniformity

Kallol Bera; Xiaoye Zhao; Kenny L. Doan; Ezra Robert Gold; Paul Brillhart; Bruno Geoffrion; Bryan Pu; Daniel J. Hoffman

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James P. Cruse

Applied Materials

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Jared Ahmad Lee

Applied Materials

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Daniel J. Hoffman

Applied Materials

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Bruno Geoffrion

Applied Materials

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Richard Fovell

Applied Materials

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Chunlei Zhang

Applied Materials

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Xiaoye Zhao

Applied Materials

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Bryan Pu

Applied Materials

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Douglas A. Buchberger

Applied Materials

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Kallol Bera

Applied Materials

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