Is this you? Create Your Porfile
Avatar

Michael Friedmann

KLA-Tencor

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Michael Friedmann is active.

Explore More

Publication

Featured researches published by Michael Friedmann.

Metrology, inspection, and process control for microlithography. Conference | 2002

Overlay metrology simulations

Joel L. Seligson; Michael Friedmann; Boris Golovanevsky; Vladimir Levinsky

In order to control and minimize overlay metrology errors, we have to deal with a number of design parameters both in the metrology tool domain and in the overlay target domain. For enhancing the rate of performance improvement vs. technology investment, simulation can be used for modeling both the effects of overlay metrology tool behavior and the impact of target designs on the ultimate metrology performance.

Archive | 2004

Apparatus and methods for detecting overlay errors using scatterometry

Walter D. Mieher; Ady Levy; Boris Golovanesky; Michael Friedmann; Ian Smith; Michael E. Adel; Anatoly Fabrikant

Archive | 2002

Periodic patterns and technique to control misalignment

Ibrahim Abdulhalim; Mike Adel; Michael Friedmann; Michael Faeyrman

Archive | 2015

PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO LAYERS

Ibrahim Abdulhalim; Mike Adel; Michael Friedmann; Michael Faeyrman

Archive | 2004

Apparatus and method for detecting overlay errors using scatterometry

Walter D. Mieher; Ady Levy; Boris Golovanesky; Michael Friedmann; Ian Smith; Michael E. Adel; Anatoly Fabrikant; Christopher F. Bevis; Noah Bareket; Kenneth P. Gross; Piotr Zalicki; Dan Wack; Paola Dececco; Thaddeus Gerard Dziura; Mark Ghinovker

Archive | 2006

Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals

Daniel Kandel; Kenneth P. Gross; Michael Friedmann; Jiyou Fu; Shankar Krishnan; Boris Golovanevsky

Archive | 2009

Periodic patterns and technique to control misaligment between two layers

Ibrahim Abdulhalim; Mike Adel; Michael Friedmann; Michael Faeyrman

Archive | 2004

Verfahren zum erkennen von überlagerungsfehlern mittels scatterometrie

Walter D. Mieher; Ady Levy; Boris Golovanevsky; Michael Friedmann; Ian Smith; Michael E. Adel; Anatoly Fabrikant; Christopher F. Bevis; Noah Bareket; Kenneth P. Gross; Piotr Zalicki; Dan Wack; Paola Dececco; Mark Ghinovker; Noam Knoll; Baruch Moshe

Archive | 2006

Mesure de superposition et d'asymetrie de profil faisant appel a des signaux de diffusiometrie symetrique et asymetrique

Michael Friedmann; Jiyou Fu; Boris Golovanevsky; Ken Gross; Daniel Kandel; Shankar Krishnan

Archive | 2004

Verfahren zum erkennen von überlagerungsfehlern mittels scatterometrie A method of detecting errors by means of scatterometry overlay

Walter D. Mieher; Ady Levy; Boris Golovanevsky; Michael Friedmann; Ian Smith; Michael E. Adel; Anatoly Fabrikant; Christopher F. Bevis; Noah Bareket; Kenneth P. Gross; Piotr Zalicki; Dan Wack; Paola Dececco; Mark Ghinovker; Noam Knoll; Baruch Moshe

Explore More

Collaboration

Dive into the Michael Friedmann's collaboration.

Top Co-Authors
Avatar

Boris Golovanevsky

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Ady Levy

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Anatoly Fabrikant

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Ian Smith

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Kenneth P. Gross

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Michael E. Adel

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Walter D. Mieher

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Christopher F. Bevis

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Dan Wack

KLA-Tencor

View shared research outputs
Top Co-Authors
Avatar

Mark Ghinovker

KLA-Tencor

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge