Michael Kneissl

AlGaN-based deep UV LEDs grown on sputtered and high temperature annealed AlN/sapphire

The performance characteristics of AlGaN-based deep ultraviolet light emitting diodes (UV-LEDs) grown by metalorganic vapor phase epitaxy on sputtered and high temperature annealed AlN/sapphire templates are investigated and compared with LEDs grown on epitaxially laterally overgrown (ELO) AlN/sapphire. The structural and electro-optical properties of the devices on 350 nm sputtered and high temperature annealed AlN/sapphire show similar defect densities and output power levels as LEDs grown on low defect density ELO AlN/sapphire templates. After high temperature annealing of the 350 nm sputtered AlN, the full widths at half maximum of the (0002) and (101¯2) reflections of the high resolution x-ray diffraction rocking curves decrease by one order of magnitude to 65 arc sec and 240 arc sec, respectively. The curvature of the sputtered and HTA AlN/sapphire templates after regrowth with 400 nm MOVPE AlN is with −80 km−1 much lower than the curvature of the ELO AlN/sapphire template of −160 km−1. The on-wafer...

Optically Pumped DFB Lasers Based on GaN Using 10th-Order Laterally Coupled Surface Gratings

An optically pumped GaN-based laser structure with 10th-order laterally coupled surface grating is demonstrated. The fabrication involved i-line photolithography and dry etching, avoiding more complex technologies such as multiple epitaxy steps. The lasing threshold of the laterally coupled distributed-feedback (LC-DFB) laser was similar to that of a ridge waveguide Fabry-Perot (RW-FP) laser. Single-peak emission with a full width at half maximum of 0.06 nm at 404.2 nm was achieved for LC-DFB lasers. In contrast to the RW-FP lasers, the LC-DFB laser is shown to exhibit a smaller shift of the emission wavelength with temperature.

Defect-Related Degradation of AlGaN-Based UV-B LEDs

This paper describes an extensive analysis of the degradation of (InAlGa)N-based UV-B light-emitting diodes (LEDs) submitted to constant current stress. This paper is based on combined electrical characterization, spectral analysis of the emission, deep-level transient spectroscopy (DLTS) and photocurrent (PC) spectroscopy. The results of this analysis demonstrate that: 1) UV-B LEDs show a gradual degradation when submitted to constant current stress; the decrease in optical power is stronger for low measuring current levels, indicating that degradation is related to the increase in Shockley-Read-Hall (SRH) recombination; 2) the current-voltage characteristics measured before/during stress show an increase in the current below the turn-on voltage, that is ascribed to the increase in trap-assisted tunneling (TAT) components; and 3) DLTS analysis and PC spectroscopy measurements were carried out to identify the properties of the defects responsible for the degradation of the optical and electrical characteristics. The results indicate that stress induces or activates defects centered around 2.5 eV below the conduction band edge. These defects, close to midgap, can explain both the increased SRH recombination and the increase in TAT components detected after stress. Moreover, the DLTS measurements allowed to identify the signature of Mg-related acceptor traps.

Defect-generation and diffusion in (In)AlGaN-based UV-B LEDs submitted to constant current stress

The aim of this work is to analyze the degradation in (In)AlGaN-based UV-B LEDs, with a nominal emission wavelength of 310 nm, submitted to constant current stress at a high current density of 350 A/cm2. We observed two main degradation mechanisms that were studied by investigating the evolution of the main emission peak from the quantum well (QW) and of a parasitic peak centered at 340 nm. In the first 50 hours of stress the main peak decreases and the parasitic peak (probably related to radiative recombination in the quantum barrier next to the electron blocking layer) increases at drive currents between 5 mA and 50 mA. Secondly, after 50 hours of stress both the main and the parasitic peak decrease. The first degradation mode could be related to carrier escape from the QWs, since the increase in the parasitic peak is correlated with the decrease in the main peak. After 50 hours of stress, we observed that the current below the turn-on voltage at V = 2 V increases with a square-root of time dependence. This behavior indicates the presence of a diffusion process, probably by point defects causing an increase of non-radiative recombination in the LED.

The effects of magnesium doping on the modal loss in AlGaN-based deep UV lasers

Absorption losses in the Mg-doped layers significantly contribute to the modal losses in group-III-nitride-based lasers. In this paper, we investigate the influence of Mg-doping on the modal absorption of optically pumped UVC lasers grown on epitaxially laterally overgrown AlN/sapphire substrates with an averaged threading dislocation density of 1 × 109 cm–2. By varying the setback of the Mg-doping (∼1 × 1020 cm−3) within the upper Al0.70Ga0.30N waveguide layer, the overlap of the optical mode with the Mg-doped region increases. For all structures, internal losses were derived from gain spectra obtained by the variable stripe length method. The internal losses increase from 10 cm−1 for lasers without Mg-doping to 28 cm−1 for lasers with a fully Mg-doped upper waveguide layer. The overlap of the optical mode with the Mg-doped waveguide ΓMg clearly correlates with the modal losses. This allows to calculate the Mg-induced losses in current injection laser diodes by α m o d M g = Γ M g × 50 cm − 1.

10th order laterally coupled GaN-based DFB laser diodes with V-shaped surface gratings

Single longitudinal mode operation of laterally coupled distributed feedback (DFB) laser diodes (LDs) based on GaN containing 10th-order surface Bragg gratings with V-shaped grooves is demonstrated using i-line stepper lithography and inductively coupled plasma etching. A threshold current of 82 mA, a slope efficiency of 1.7 W/A, a single peak emission at 404.5 nm with a full width at half maximum of 0.04 nm and a side mode suppression ratio of > 23 dB at an output power of about 46 mW were achieved under pulsed operation. The shift of the lasing wavelength of DFB LDs with temperature was around three times smaller than that of conventional ridge waveguide LDs.

Effect of Electron Blocking Layer Doping and Composition on the Performance of 310 nm Light Emitting Diodes

The effects of composition and p-doping profile of the AlGaN:Mg electron blocking layer (EBL) in 310 nm ultraviolet B (UV-B) light emitting diodes (LEDs) have been investigated. The carrier injection and internal quantum efficiency of the LEDs were simulated and compared to electroluminescence measurements. The light output power depends strongly on the temporal biscyclopentadienylmagnesium (Cp2Mg) carrier gas flow profile during growth as well as on the aluminum profile of the AlGaN:Mg EBL. The highest emission power has been found for an EBL with the highest Cp2Mg carrier gas flow and a gradually decreasing aluminum content in direction to the p-side of the LED. This effect is attributed to an improved carrier injection and confinement that prevents electron leakage into the p-doped region of the LED with a simultaneously enhanced carrier injection into the active region.

Highly Reflective p-Contacts Made of Pd-Al on Deep Ultraviolet Light-Emitting Diodes

Highly reflective metal contacts for the p-layers of AlGaN-based deep ultraviolet light emitting diodes (DUV LEDs) emitting at 305 nm have been investigated. Different Pd-Al metal stacks have been examined and a reflectivity of 82% was obtained after annealing, which is about two times the value measured for conventional Pd contacts. The high reflectivity is attributed to the formation of an Al4Pd phase besides an Al phase in the annealed contact. DUV LEDs with highly-reflective Pd-Al contacts exhibited an increase of the light output power by 30% at a dc current of 20 mA.