Michael M. Iwatake | Researchain

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Publication

Featured researches published by Michael M. Iwatake.

Archive | 2004

Dual silicide via contact structure and process

Michael M. Iwatake; Kevin E. Mello; Matthew W. Oonk; Amanda L. Piper; Yun Y. Wang; Keith Kwong Hon Wong

Archive | 2004

Via contact structure having dual silicide layers

Michael M. Iwatake; Kevin E. Mello; Matthew W. Oonk; Amanda L. Piper; Yun Y. Wang; Keith Kwong Hon Wong

Archive | 2002

Low Cu percentages for reducing shorts in AlCu lines

Roy C. Iggulden; Padraic Shafer; Kwong Hon Wong; Michael M. Iwatake; Jay W. Strane; Thomas Goebel; Donna D. Miura; Chet Dziobkowski; Werner Robl; Brian Hughes

Archive | 2004

Geringer Kupferanteil zum Verringern von Kurzschlüssen in AICu-Leitungen

Chester T. Dziobkowski; Thomas Goebel; Brian Hughes; Roy C. Iggulden; Michael M. Iwatake; Donna D. Miura; Werner Robl; Padraic Shafer; Kwong Hon Wong; Jay W. Strane

Archive | 2003

Verfahren für ein verbessertes epitaktisches Wiederaufwachsen amorpher Polysilizium-CB-Kontakte

David M. Dobuzinsky; Johnathan E. Faltermeier; Philip L. Flaitz; Michael M. Iwatake; Michael Maldei; Lisa Y. Ninomiya; Ravikumar Ramachardran; Virai Y. Sardesai; Colleen M. Snavely; Yun Yu Wang

Archive | 2003

Verfahren für ein verbessertes epitaktisches Wiederaufwachsen amorpher Polysilizium-CB-Kontakte Method for an improved epitaxial regrowth of amorphous poly-CB contacts

David M. Dobuzinsky; Johnathan E. Faltermeier; Philip L. Flaitz; Michael M. Iwatake; Michael Maldei; Lisa Y. Ninomiya; Ravikumar Ramachardran; Virai Y. Sardesai; Colleen M. Snavely; Yun Yu Wang

Archive | 2003

Lower copper content to reduce short circuits in AlCu lines

Chester T. Dziobkowski; Thomas Goebel; Brian San Jose Hughes; Roy C. Iggulden; Michael M. Iwatake; Donna D. Miura; Werner Robl; Padraic Shafer; Jay W. Strane; Kwong Hon Wong

Archive | 2003

Geringer Kupferanteil zum Verringern von Kurzschlüssen in AICu-Leitungen Low copper content of reducing short-circuits in AlCu lines

Chester T. Dziobkowski; Thomas Goebel; Brian San Jose Hughes; Roy C. Iggulden; Michael M. Iwatake; Donna D. Miura; Werner Robl; Padraic Shafer; Jay W. Strane; Kwong Hon Wong

Archive | 2003

A method for an improved epitaxial regrowth of amorphous polysilicon contacts CB

David M. Dobuzinsky; Johnathan E. Faltermeier; Philip L. Flaitz; Michael M. Iwatake; Michael Maldei; Lisa Y. Ninomiya; Ravikumar Ramachardran; Virai Y. Sardesai; Colleen M. Snavely; Yun Yu Wang

Archive | 2002

Method to enhance epitaxial regrowth in amorphous silicon contacts

Yun Yu Wang; Johnathan E. Faltermeier; Colleen M. Snavely; Michael Maldei; Michael M. Iwatake; David M. Dobuzinsky; Viraj Y. Sardesai; Philip L. Flaitz; Lisa Y. Ninomiya

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