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Dive into the research topics where Michael Trunz is active.

Publication


Featured researches published by Michael Trunz.


Archive | 1999

Assembly of optical element and mount

Hubert Holderer; Peter Rümmer; Michael Trunz


Archive | 2000

Optical imaging device, particularly an objective, with at least one optical element

Michael Trunz; Ralf Hilgers; Erich Merz; Michael Mühlbeyer


Archive | 2000

Assembly comprising an optical element and a mount

Michael Trunz; Ralf Hilgers; Bernhard Gellrich


Archive | 1999

Assembly comprising an optical element and its mounting

Hubert Holderer; Peter Rümmer; Michael Trunz


Archive | 2000

Assembly comprising an optical element and an optical mount

Bernhard Gellrich; Ralf Hilgers; Michael Trunz


Archive | 2001

Optical arrangement and projection exposure system for microlithography with passive thermal compensation

Christian Wagner; Michael Trunz; Ralf Hilgers


Archive | 1999

Assembly consisting of optical element and mount

Hubert Holderer; Peter Ruemmer; Michael Trunz; ヒューベルト・ホルデラー; ペーター・リュマー; ミヒャエル・トルンツ


Archive | 1999

Optical device and a microlithography projection exposure system with passive thermal compensation

Ralf Hilgers; Michael Trunz; Christian Wagner


Archive | 2000

Method of straightening the supporting surfaces of supporting elements for optical elements

Michael Trunz; Bernhard Gellrich


Archive | 1999

Optical device, especially objective, with at least one optical element

Ralf Hilgers; Erich Merz; Michael Mühlbeyer; Michael Trunz

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