Michikazu Matsumoto | Researchain

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Featured researches published by Michikazu Matsumoto.

Archive | 2000

Method of forming electrode structure and method of fabricating semiconductor device

Michikazu Matsumoto; Naohisa Sengoku

Archive | 1996

Semiconductor device having polysilicon electrode minimization resulting in a small resistance value

Michikazu Matsumoto; Minoru Fujii; Toshiki Yabu

Archive | 2000

Method of cleaning electronic device and method of fabricating the same

Yukihisa Wada; Michikazu Matsumoto

Archive | 2001

Electrode structure and method for fabricating the same

Michikazu Matsumoto; Naohisa Sengoku

Archive | 1996

Semiconductor device which reduces the minimum distance requirements between active areas

Mizuki Segawa; Isao Miyanaga; Toshiki Yabu; Takashi Nakabayashi; Takashi Uehara; Kyoji Yamashita; Takaaki Ukeda; Masatoshi Arai; Takayuki Yamada; Michikazu Matsumoto

Archive | 2004

Resistance defect assessment device, resistance defect assessment method, and method for manufacturing resistance defect assessment device

Michikazu Matsumoto; Yasutoshi Okuno; Katsuyoshi Joukyu; Tetsuya Matsutani

Archive | 1996

Semiconductor apparatus and production method for the same

Masahiro Fukui; Mizuki Segawa; Toshiro Akino; Michikazu Matsumoto

Microelectronic Engineering | 2008

Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2

Kazuo Tsutsui; Ruifei Xiang; Koji Nagahiro; Takashi Shiozawa; Parhat Ahmet; Yasutoshi Okuno; Michikazu Matsumoto; Masafumi Kubota; Kuniyuki Kakushima; Hiroshi Iwai

Archive | 1993