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Nishi Tsunehiro

Shin-Etsu Chemical

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Publication

Featured researches published by Nishi Tsunehiro.

Archive | 2008

Positive resist material and pattern forming method

Nishi Tsunehiro; Kanao Go; Ohashi Masaki; Hasegawa Koji; Iio Tadashi

Archive | 1999

New lactone-containing compound, high polymeric compound, resist material and pattern formation

Hasegawa Koji; Nishi Tsunehiro; Kanou Takeshi; Hatakeyama Jun; Watanabe Osamu

Archive | 2002

Basic compound, resist material and pattern-forming method

Hatakeyama Jun; Watanabe Takeshi; Nagata Takashi; Maeda Kazunori; Nishi Tsunehiro

Archive | 2002

NEW ESTER COMPOUND, POLYMER COMPOUND, RESIST MATERIAL AND METHOD OF PATTERN FORMING

Hasegawa Koji; Nishi Tsunehiro; Kanou Takeshi; Watanabe Takeshi; Nakajima Mutsuo; Tachibana Seiichiro; Hatakeyama Jun

Archive | 2001

CHEMICAL AMPLIFICATION TYPE RESIST MATERIAL

Takeda Takanobu; Watanabe Osamu; Watanabe Atsushi; Hatakeyama Jun; Nishi Tsunehiro; Kanou Takeshi

Archive | 2002

BASIC COMPOUND, RESIST MATERIAL AND METHOD FOR FORMING PATTERN

Hatakeyama Jun; Watanabe Takeshi; Nagata Takashi; Maeda Kazunori; Nishi Tsunehiro

Archive | 2009

LACTONE-CONTAINING COMPOUND, POLYMERIC COMPOUND, RESIST MATERIAL AND METHOD FOR FORMING PATTERN

Hasegawa Koji; Shinaji Satoshi; Kobayashi Katsuhiro; Nishi Tsunehiro; Kanao Go

Archive | 2003

OPTICAL ACID-GENERATING AGENT, CHEMICAL AMPLIFICATION RESIST MATERIAL, AND METHOD FOR FORMING PATTERN

Kobayashi Tomohiro; Watanabe Satoshi; Nishi Tsunehiro; Osawa Yoichi; Kobayashi Katsuhiro

Archive | 2002

NEW ESTER COMPOUND, HIGH-MOLECULAR COMPOUND, RESIST MATERIAL AND METHOD FOR FORMING PATTERN

Nishi Tsunehiro; Hasegawa Koji; Watanabe Takeshi; Kanou Takeshi; Nakajima Mutsuo; Tachibana Seiichiro; Hatakeyama Jun

Archive | 2003

POLYMER COMPOUND, RESIST MATERIAL, PATTERN FORMATION METHOD AND NEW TETRAHYDROFURAN COMPOUND WITH ITS PRODUCTION METHOD

Nishi Tsunehiro; Kanou Takeshi; Tachibana Seiichiro; Watanabe Takeshi; Hasegawa Koji; Kobayashi Tomohiro

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Collaboration

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Hasegawa Koji

Shin-Etsu Chemical

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Hatakeyama Jun

Shin-Etsu Chemical

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Kinsho Takeshi

Shin-Etsu Chemical

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Tachibana Seiichiro

Shin-Etsu Chemical

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Watanabe Takeru

Shin-Etsu Chemical

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Nakashima Mutsuo

Shin-Etsu Chemical

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Funatsu Kenji

Shin-Etsu Chemical

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Kobayashi Tomohiro

Shin-Etsu Chemical

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Ohashi Masaki

Shin-Etsu Chemical

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Watanabe Osamu

Shin-Etsu Chemical

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