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Tachibana Seiichiro

Shin-Etsu Chemical

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Publication

Featured researches published by Tachibana Seiichiro.

Archive | 2009

Positive resist material and patterning process using the same

Hatakeyama Jun; Hasegawa Koji; Tachibana Seiichiro

Archive | 2009

ANTIREFLECTIVE COATING COMPOSITION, ANTIREFLECTIVE COATING, AND PATTERNING PROCESS USING THE SAME

Tachibana Seiichiro; Noda Kazumi; Hatakeyama Jun; Kanou Takeshi

Archive | 2008

RESIST LOWER LAYER FILM MATERIAL AND PATTERNING PROCESS USING THE SAME

Hatakeyama Jun; Noda Kazumi; Tachibana Seiichiro; Kanou Takeshi; Ogiwara Tsutomu

Archive | 2012

POLYMERIZABLE MONOMER, POLYMER COMPOUND, CHEMICALLY AMPLIFIED POSITIVE RESIST MATERIAL, AND METHOD FOR FORMING PATTERN

Hatakeyama Jun; Tachibana Seiichiro; Hasegawa Koji

Archive | 2002

NEW ESTER COMPOUND, POLYMER COMPOUND, RESIST MATERIAL AND METHOD OF PATTERN FORMING

Hasegawa Koji; Nishi Tsunehiro; Kanou Takeshi; Watanabe Takeshi; Nakajima Mutsuo; Tachibana Seiichiro; Hatakeyama Jun

Archive | 2013

ORGANIC FILM MATERIAL, METHOD FOR FORMING ORGANIC FILM AND METHOD FOR FORMING PATTERN USING THE SAME, AND HEAT-DECOMPOSABLE POLYMER

Watanabe Takeshi; Tachibana Seiichiro; Fujii Toshihiko; Noda Kazumi; Yano Toshiharu; Kanao Go

Archive | 2011

POSITIVE TYPE RESIST MATERIAL AND PATTERN FORMING METHOD USING THE SAME

Hatakeyama Jun; Watanabe Takeshi; Tachibana Seiichiro

Archive | 2011

ACID-CLEAVABLE ESTER MONOMER HAVING SPIRO RING STRUCTURE, POLYMER COMPOUND, RESIST MATERIAL AND PATTERN-FORMING METHOD

Kanao Go; Kobayashi Tomohiro; Sagehashi Masayoshi; Watanabe Takeshi; Hasegawa Koji; Tachibana Seiichiro

Archive | 2006

FLUORINE-CONTAINING POLYMERIZABLE ESTER COMPOUND, ITS MANUFACTURING PROCESS, POLYMER, PHOTORESIST COMPOSITION AND METHOD OF IMAGING

Kanou Takeshi; Watanabe Takeshi; Tachibana Seiichiro; Hatakeyama Jun

Archive | 2002

NEW ESTER COMPOUND, HIGH-MOLECULAR COMPOUND, RESIST MATERIAL AND METHOD FOR FORMING PATTERN

Nishi Tsunehiro; Hasegawa Koji; Watanabe Takeshi; Kanou Takeshi; Nakajima Mutsuo; Tachibana Seiichiro; Hatakeyama Jun

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Collaboration

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Hatakeyama Jun

Shin-Etsu Chemical

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Hasegawa Koji

Shin-Etsu Chemical

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Nishi Tsunehiro

Shin-Etsu Chemical

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Kinsho Takeshi

Shin-Etsu Chemical

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Watanabe Takeru

Shin-Etsu Chemical

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Ohashi Masaki

Shin-Etsu Chemical

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Ogihara Tsutomu

Shin-Etsu Chemical

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Kobayashi Tomohiro

Shin-Etsu Chemical

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Taneda Yoshinori

Shin-Etsu Chemical

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Nakashima Mutsuo

Shin-Etsu Chemical

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