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Hasegawa Koji

Shin-Etsu Chemical

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Publication

Featured researches published by Hasegawa Koji.

Archive | 2008

Positive resist material and pattern forming method

Nishi Tsunehiro; Kanao Go; Ohashi Masaki; Hasegawa Koji; Iio Tadashi

Archive | 1999

New lactone-containing compound, high polymeric compound, resist material and pattern formation

Hasegawa Koji; Nishi Tsunehiro; Kanou Takeshi; Hatakeyama Jun; Watanabe Osamu

Archive | 2009

Positive resist material and patterning process using the same

Hatakeyama Jun; Hasegawa Koji; Tachibana Seiichiro

Archive | 2009

Sulfonium salt, resist material and method for forming pattern

Sagehashi Masayoshi; Osawa Yoichi; Hasegawa Koji; Kanao Go; Kobayashi Tomohiro

Archive | 2004

POLYMER COMPOUND, POSITIVE RESIST MATERIAL, AND METHOD FOR FORMING PATTERN USING THE RESIST MATERIAL

Hatakeyama Jun; Kanou Takeshi; Hasegawa Koji; Watanabe Takeshi; Watanabe Osamu; Takeda Takanobu

Archive | 2013

POLYMERIZABLE TERTIARY ESTER COMPOUND, POLYMERIC COMPOUND, RESIST MATERIAL, AND PATTERNING METHOD

Suga Yuki; Hatakeyama Jun; Hasegawa Koji

Archive | 2012

POLYMERIZABLE MONOMER, POLYMER COMPOUND, CHEMICALLY AMPLIFIED POSITIVE RESIST MATERIAL, AND METHOD FOR FORMING PATTERN

Hatakeyama Jun; Tachibana Seiichiro; Hasegawa Koji

Archive | 2002

NEW ESTER COMPOUND, POLYMER COMPOUND, RESIST MATERIAL AND METHOD OF PATTERN FORMING

Hasegawa Koji; Nishi Tsunehiro; Kanou Takeshi; Watanabe Takeshi; Nakajima Mutsuo; Tachibana Seiichiro; Hatakeyama Jun

Archive | 2012

FLUOROALCOHOL COMPOUND, FLUORINATED MONOMER, POLYMER COMPOUND, RESIST MATERIAL AND PATTERNING PROCESS

Hasegawa Koji; Watanabe Takeshi; Kobayashi Tomohiro; Kanao Go

Archive | 2009

PATTERN FORMING METHOD AND RESIST MATERIAL FOR USE IN IT

Hatakeyama Jun; Yoshihara Takao; Kanou Takeshi; Hasegawa Koji; Kawai Yoshio; Takemura Katsuya

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Collaboration

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Hatakeyama Jun

Shin-Etsu Chemical

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Nishi Tsunehiro

Shin-Etsu Chemical

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Sagehashi Masayoshi

Shin-Etsu Chemical

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Tachibana Seiichiro

Shin-Etsu Chemical

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Kinsho Takeshi

Shin-Etsu Chemical

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Watanabe Takeru

Shin-Etsu Chemical

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Katayama Kazuhiro

Shin-Etsu Chemical

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Ohashi Masaki

Shin-Etsu Chemical

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Kobayashi Tomohiro

Shin-Etsu Chemical

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Nakashima Mutsuo

Shin-Etsu Chemical

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