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Oleg V. Serebryanov

Applied Materials

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Publication

Featured researches published by Oleg V. Serebryanov.

Archive | 2011

Lamp failure detector

Oleg V. Serebryanov; Alexander Goldin; Joseph M. Ranish

Archive | 2007

Method and apparatus for verifying proper substrate positioning

Oleg V. Serebryanov; Alexander N. Lerner; Aaron Muir Hunter; Joseph M. Ranish

Archive | 2013

QUARTZ UPPER AND LOWER DOMES

Anzhong Chang; Paul Brillhart; Mehmet Tugrul Samir; Anh N. Nguyen; Kailash Kiran Patalay; Surajit Kumar; Steve Aboagye; David K. Carlson; Satheesh Kuppurao; Joseph M. Ranish; Oleg V. Serebryanov; Dongming Iu; Shu-Kwan Lau; Zouming Zhu; Herman Diniz

Archive | 2015

TOP WAFER ROTATION AND SUPPORT

Oleg V. Serebryanov; Joseph M. Ranish; Aaron Muir Hunter

Archive | 2014

HIGH DENSITY SOLID STATE LIGHT SOURCE ARRAY

John Gerling; Joseph M. Ranish; Oleg V. Serebryanov; Joseph Johnson

Archive | 2014

LAMPHEAD PCB WITH FLEXIBLE STANDOFFS

Joseph M. Ranish; Oleg V. Serebryanov; Dongming Iu

Archive | 2013

Direct current lamp driver for substrate processing

Oleg V. Serebryanov; Joseph M. Ranish; Alexander Goldin

Archive | 2011

High efficiency high accuracy heater driver

Alexander Goldin; Oleg V. Serebryanov

Archive | 2014

Adapter for replaceable lamp

Joseph M. Ranish; Oleg V. Serebryanov

Archive | 2017

A adapter and banks spare for handle cavity

Aaron Miller; Oleg V. Serebryanov; Joseph M. Ranish

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Collaboration

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Joseph M. Ranish

Applied Materials

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Alexander Goldin

Applied Materials

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Dongming Iu

Applied Materials

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Aaron Muir Hunter

Applied Materials

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Kenric Choi

Applied Materials

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Aaron Miller

Applied Materials

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Abhilash J. Mayur

Applied Materials

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Alexander N. Lerner

Applied Materials

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Anh N. Nguyen

Applied Materials

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Anzhong Chang

Applied Materials

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