Richard A. Marsh | Researchain

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Archive | 1996

Heater with shadow ring and purge above wafer surface

Salvador P. Umotoy; Alan F. Morrison; Karl A. Littau; Richard A. Marsh; Lawrence Chung-Lai Lei; Dale R. DuBois

Archive | 1994

Substrate support shield in wafer processing reactors

Dale R. DuBois; Alan F. Morrison; Richard A. Marsh; Mei Chang

Archive | 1995

Removable ring for controlling edge deposition in substrate processing apparatus

Salvador P. Umotoy; Alan F. Morrison; Karl A. Littau; Richard A. Marsh; Lawrence Chung-Lai Lei

Archive | 1998

Measurement of quantity of incompressible substance in a closed container

John Vincent Schmitt; Richard A. Marsh

Archive | 1995

Substrate processing reactors

Dale R. DuBois; Alan F. Morrison; Richard A. Marsh; Mei Chang

Archive | 1996

Apparatus for supporting substrates in processing chambers

Salvador P. Umotoy; Alan F. Morrison; Karl A. Littau; Richard A. Marsh; Lawrence Chung-Lai Lei

Archive | 1998

HEATER HAVING SHADOW RING AND PURGE ON WAFER SURFACE

Salvador Umotoi; Alan F. Morrison; Karl Ritau; Richard A. Marsh; Lawrence Chan-Lay Rey; Dale Duboyce

Archive | 1996

MOVABLE RING FOR CONTROLLING EDGE ACCUMULATION IN SUBSTRATE PROCESSING DEVICE

Lawrence Chung-Lai Lei; Karl A. Littau; Richard A. Marsh; Alan F. Morrison; Salvador P. Umotoy; エフ．モリソンアラン; エー．リタウカール; ピー．ウモトイサルヴァドール; エー．マーシュリチャード; チャン−ライレイローレンス

Archive | 1995