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Saenger Annette

Infineon Technologies

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Publication

Featured researches published by Saenger Annette.

Archive | 2001

Grabenkondensator einer DRAM-Speicherzelle mit metallischem Collarbereich und nicht-metallischer Leitungsbrücke zum Auswahltransistor

Sell Bernhard; Saenger Annette; Gutsche Martin; Seidl Harald; Alsmeier Johann

Archive | 2005

Herstellungsverfahren für einen Grabenkondensator mit einem Isolationskragen, der über einen vergrabenen Kontakt einseitig mit einem Substrat elektrisch verbunden ist, insbesondere für eine Halbleiterspeicherzelle

Kudelka Stephan; Saenger Annette; Seidl Harald; Popp Martin

Archive | 2002

Verfahren zur Entfernung einer Maskenschicht von einem Halbleitersubstrat

Sell Bernhard; Saenger Annette; Thieme Peter; Drummer Heike

Archive | 2002

Chemical vapor deposition of thin film e.g. dielectric material, metal (alloy) or metal nitride or silicide on semiconductor, especially for filling deep trench capacitors and contact holes, is carried out in presence of nitroxyl radical

Saenger Annette

Archive | 2002

POLISHING LIQUID FOR PATTERNING METAL AND METAL OXIDE, AND METHOD FOR PATTERNING METAL AND METAL OXIDE

Beitel Gerhard; Seebacher Baerbel; Saenger Annette

Archive | 2003

Fabrication of trench capacitor for memory cell, by forming trench in substrate, providing lower capacitor electrode adjoining wall of trench in lower trench region, and providing storage dielectric and upper capacitor electrode

Sell Bernhard; Saenger Annette; Gutsche Martin; Seidl Harald

Archive | 2001

Polierflüssigkeit und Verfahren zur Strukturierung von Metallen und Metalloxiden

Beitel Gerhard; Saenger Annette; Seebacher Baerbel

Archive | 2006

Trench capacitor of a DEAM memory cell with metallic collar region and nonmetallic buried strap to the select transistor

Alsmeier Johann; Gutsche Martin; Sell Bernhard; Saenger Annette; Seidl Harald

Archive | 2006

Verfahren zur Herstellung einer Metallkarbidschicht und Verfahren zur Herstellung eines Grabenkondensators

Sell Bernhard; Saenger Annette; Gutsche Martin; Seidl Harald; Moll Peter

Archive | 2005

Method to chemical-mechanically polish layers made of platin group metals

Beitel Gerhard; Saenger Annette; Mainka Gerd; Schnabel Florian

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Sell Bernhard

Infineon Technologies

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Seidl Harald

Infineon Technologies

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Gutsche Martin

Infineon Technologies

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Beitel Gerhard

Infineon Technologies

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Schumann Dirk

Infineon Technologies

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Alsmeier Johann

Infineon Technologies

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Birner Albert

Infineon Technologies

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Hecht Thomas

Infineon Technologies

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Mainka Gerd

Infineon Technologies

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Moll Peter

Infineon Technologies

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