Santosh Bhattacharyya

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Featured researches published by Santosh Bhattacharyya.

Archive | 2008

Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

Kris Bhaskar; Chetana Bhaskar; Ashok Kulkarni; Eliezer Rosengaus; Cecelia Campochiaro; Chris Maher; Brian Duffy; Aneesh Khullar; Alpa Kohli; Lalita A. Balasubramanian; Santosh Bhattacharyya; Mohan Mahadevan

Archive | 2008

Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer

Kris Bhaskar; Mark A. McCord; Santosh Bhattacharyya; Ardis Liang; Richard Wallingford; Hubert Altendorfer; Kais Maayah

Archive | 2005

Methods, defect review tools, and systems for locating a defect in a defect review process

Da Chen; Christophe Fouquet; Saibal Banerjee; Santosh Bhattacharyya; Joe Wang; Lian Yao; Mike Van Riet; Igor N. Germanenko

Archive | 2008

Systems and methods for detecting defects on a wafer and generating inspection results for the wafer

Ashok Kulkarni; Santosh Bhattacharyya

Archive | 2012

Determining design coordinates for wafer defects

Ellis Chang; Michael J. Van Riet; Allen Park; Khurram Zafar; Santosh Bhattacharyya

Archive | 2004

Outlier substrate inspection

Jason Z. Lin; Hong Chen; Evgeni Shifrin; Ashok Kulkarni; Santosh Bhattacharyya; Wei Zhao; Chien-Huei Chen

Archive | 2015

Alignment of Inspection to Design Using Built in Targets

Santosh Bhattacharyya; Bjoern Braeuer; Lisheng Gao

Archive | 2017

SHAPE BASED GROUPING

Saibal Banerjee; Ashok Kulkarni; Jagdish Saraswatula; Santosh Bhattacharyya

Archive | 2017

Improving defect sensitivity of semiconductor wafer inspectors using design data with wafer image data

Bjorn Brauer; Santosh Bhattacharyya; Saibal Banerjee; Ashok Kulkarni

Archive | 2016

Sub-Pixel Alignment of Inspection to Design

Santosh Bhattacharyya; Pavan Kumar; Lisheng Gao; Thirupurasundari Jayaraman; Raghav Babulnath; Srikanth Kandukuri; Gangadharan Sivaraman; Karthikeyan Subramanian; Raghavan Konuru; Rahul Lakhawat

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