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Dive into the research topics where Shashank S. Ekbote is active.

Publication


Featured researches published by Shashank S. Ekbote.


IEEE Electron Device Letters | 2011

Pocket Implant-Dependent Channel Mobility in Advanced p-MOSFETs With Strain Engineering

Youn Sung Choi; Shashank S. Ekbote; Greg C. Baldwin

A new approach to channel mobility engineering using strained-Si technology is described with a complete data analysis. It is discussed that [110]/(100) Si channel mobility in p-MOSFET with embedded SiGe source/drain and compressive stress liner can be strongly dependent on pocket implant dose, resulting from a change in piezoresistance coefficient as a function of p-type carrier dopant concentration in the vicinity of the channel, whereas channel mobility of n-MOSFETs shows weaker dependence on pocket implant dose due to: 1) smaller piezoresistance coefficient of n-channel and 2) less channel strain relative to p-MOSFETs.


Archive | 2005

Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance

Haowen Bu; Shashank S. Ekbote; Rajesh Khamankar; Shaoping Tang; Freidoon Mehrad


Archive | 2010

MOS DEVICE AND PROCESS HAVING LOW RESISTANCE SILICIDE INTERFACE USING ADDITIONAL SOURCE/DRAIN IMPLANT

Borna Obradovic; Shashank S. Ekbote; Mark R. Visokay


Archive | 2007

METHOD TO IMPROVE TRANSISTOR TOX USING SI RECESSING WITH NO ADDITIONAL MASKING STEPS

Borna Obradovic; Shashank S. Ekbote


Archive | 2005

Method of making transistors and non-silicided polysilicon resistors for mixed signal circuits

Sarah Liu; Greg C. Baldwin; Haowen Bu; Shashank S. Ekbote


Archive | 2007

Method to improve transistor Tox using high-angle implants with no additional masks

Borna Obradovic; Shashank S. Ekbote


Archive | 2005

Novel gate sidewall spacer and method of manufacture therefor

Richard P. Rouse; Shashank S. Ekbote; Haowen Bu


Archive | 2002

Shallow trench isolation structure and method

Freidoon Mehrad; Zhihao Chen; Shashank S. Ekbote; Brian M. Trentman


Archive | 2012

INTEGRATED CIRCUIT HAVING SILICIDE BLOCK RESISTOR

Song Zhao; Gregory Charles Baldwin; Shashank S. Ekbote; Youn Sung Choi


Archive | 2007

Method for forming a metal silicide

Haowen Bu; Shashank S. Ekbote; Juanita Deloach

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