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Shih-Ming Chang

TSMC

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Publication

Featured researches published by Shih-Ming Chang.

Archive | 2015

Spacer Etching Process For Integrated Circuit Design

Ru-Gun Liu; Cheng-Hsiung Tsai; Chung-Ju Lee; Chih-Ming Lai; Chia-Ying Lee; Jyu-Horng Shieh; Ken-Hsien Hsieh; Ming-Feng Shieh; Shau-Lin Shue; Shih-Ming Chang; Tien-I Bao; Tsai-Sheng Gau

Archive | 2014

Via-free interconnect structure with self-aligned metal line interconnections

Yu-Po Tang; Shih-Ming Chang; Ken-Hsien Hsieh; Ru-Gun Liu

Archive | 2013

Self Aligned Patterning With Multiple Resist Layers

Ming-Feng Shieh; Ken-Hsien Hsieh; Shih-Ming Chang; Chih-Ming Lai; Ru-Gun Liu

Archive | 2015

Self-Alignment for using Two or More Layers and Methods of Forming Same

Shih-Ming Chang; Ru-Gun Liu; Ken-Hsien Hsieh; Ming-Feng Shieh; Chih-Ming Lai; Tsai-Sheng Gau

Archive | 2012

Semiconductor Device With Self-Aligned Interconnects and Blocking Portions

Shih-Ming Chang; Ken-Hsien Hsieh; Tsong-Hua Ou; Ru-Gun Liu; Fang-Yu Fan; Yuan-Te Hou

Archive | 2016

Methods for Integrated Circuit Design and Fabrication

Tsong-Hua Ou; Ken-Hsien Hsieh; Shih-Ming Chang; Wen-Chun Huang; Chih-Ming Lai; Ru-Gun Liu; Tsai-Sheng Gau

Archive | 2014

Self-Aligned Semiconductor Fabrication With Fosse Features

Shih-Ming Chang; Ken-Hsien Hsieh; Chih-Ming Lai; Ming-Feng Shieh; Ru-Gun Liu; Tsai-Sheng Gau

Archive | 2014

PHOTO RESIST TRIMMED LINE END SPACE

Chia-Ying Lee; Jyu-Horng Shieh; Ming-Feng Shieh; Shih-Ming Chang; Chih-Ming Lai; Ken-Hsien Hsieh; Ru-Gun Liu

Archive | 2015

Mechanisms for forming patterns

Ru-Gun Liu; Chung-Te Lin; Ming-Feng Shieh; Tsai-Sheng Gau; Shih-Ming Chang

Archive | 2012

Semiconductor Device with Self-Aligned Interconnects

Shih-Ming Chang; Ken-Hsien Hsieh; Tsong-Hua Ou; Ru-Gun Liu; Fang-Yu Fan; Yuan-Te Hou

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Collaboration

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Ru-Gun Liu

TSMC

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Ken-Hsien Hsieh

TSMC

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Ming-Feng Shieh

TSMC

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Chih-Ming Lai

TSMC

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Tsai-Sheng Gau

TSMC

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Tsong-Hua Ou

TSMC

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Fang-Yu Fan

TSMC

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Yuan-Te Hou

TSMC

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Chia-Ying Lee

TSMC

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Jyu-Horng Shieh

TSMC

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