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Chia-Ying Lee

TSMC

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Publication

Featured researches published by Chia-Ying Lee.

Archive | 2015

Multi-patterning method and device formed by the method

Chia-Ying Lee; Jyu-Horng Shieh

Archive | 2015

Spacer Etching Process For Integrated Circuit Design

Ru-Gun Liu; Cheng-Hsiung Tsai; Chung-Ju Lee; Chih-Ming Lai; Chia-Ying Lee; Jyu-Horng Shieh; Ken-Hsien Hsieh; Ming-Feng Shieh; Shau-Lin Shue; Shih-Ming Chang; Tien-I Bao; Tsai-Sheng Gau

Archive | 2013

Double patterning method

Chia-Ying Lee; Jyu-Horng Shieh

Archive | 2011

Method of forming pattern for semiconductor device

Chia-Ying Lee; Chih-Yuan Ting; Jyu-Horng Shieh; Minghsing Tsai; Syun-Ming Jang

Archive | 2012

Method of patterning for a semiconductor device

Chia-Ying Lee; Chih-Yuan Ting; Jyu-Horng Shieh

Archive | 2015

Integrated Circuit Features with Fine Line Space and Methods for Forming the Same

Chia-Ying Lee; Jyu-Horng Shieh

Archive | 2014

PHOTO RESIST TRIMMED LINE END SPACE

Chia-Ying Lee; Jyu-Horng Shieh; Ming-Feng Shieh; Shih-Ming Chang; Chih-Ming Lai; Ken-Hsien Hsieh; Ru-Gun Liu

Archive | 2013

PATTERNED LINE END SPACE

Chia-Ying Lee; Jyu-Horng Shieh

Archive | 2017

Method of Fine Line Space Resolution Lithography for Integrated Circuit Features Using Double Patterning Technology

Chia-Ying Lee; Jyu-Horng Shieh

Archive | 2014

SEMICONDUCTOR DEVICE WITH SELF ALIGNED END-TO-END CONDUCTIVE LINE STRUCTURE AND METHOD FOR FORMING THE SAME

Chia-Ying Lee; Jyu-Horng Shieh

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Collaboration

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Jyu-Horng Shieh

TSMC

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Chih-Ming Lai

TSMC

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Ken-Hsien Hsieh

TSMC

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Ming-Feng Shieh

TSMC

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Ru-Gun Liu

TSMC

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Shih-Ming Chang

TSMC

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Chih-Yuan Ting

TSMC

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Cheng-Hsiung Tsai

TSMC

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Chung-Ju Lee

TSMC

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Minghsing Tsai

TSMC

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