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Dive into the research topics where Simon Yavelberg is active.

Publication


Featured researches published by Simon Yavelberg.


Archive | 1999

Temperature control system for process chamber

Dmitry Lubomirsky; Allen I. D'ambra; Edward L Floyd; Qiwei Liang; Daniel J. Hoffman; Victor H. Fuentes; Simon Yavelberg; Jerry C. Chen


Archive | 1997

Closed-loop dome thermal control apparatus for a semiconductor wafer processing system

Patrick Leahey; Jerry C. Chen; Richard E. Remington; Simon Yavelberg; Timothy D. Driscoll; Robert E. Ryan; Brian K. Hatcher; Rolf A. Guenther; Xueyu Qian


Archive | 2006

Six headed carousel

Hung Chih Chen; Simon Yavelberg


Archive | 2004

Load cup for chemical mechanical polishing

Alpay Yilmaz; Simon Yavelberg; Toshikazu Tomita; Hui Chen; Noel Manto; David J. Lischka; Hung Chih Chen


Archive | 1996

Insulation jacket for fluid carrying conduits

William L. Manofsky; Simon Yavelberg


Archive | 1997

Process gas delivery system

Simon Yavelberg


Archive | 1995

Method for detection of failed heater in a daisy chain connection

Simon Yavelberg


Archive | 2013

Recording Measurements by Sensors for a Carrier Head

Simon Yavelberg


Archive | 2007

Multiple substrate vapor drying systems and methods

Donald J. K. Olgado; Simon Yavelberg; Edwin Velaquez; Hui Chen; Sheshraj L. Tulshibagwale; Ho Seon Shin


Archive | 1999

Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket

Dmitry Lubomirsky; Harald Herchen; Simon Yavelberg; David Palagashvili; Donald J. K. Olgado

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