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Swaminathan Srinivasan

Applied Materials

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Publication

Featured researches published by Swaminathan Srinivasan.

Archive | 2011

Apparatus and methods for cyclical oxidation and etching

Udayan Ganguly; Joseph M. Ranish; Aaron Muir Hunter; Jing Tang; Christopher S. Olsen; Matthew D. Scotney-Castle; Vicky Nguyen; Swaminathan Srinivasan; Johanes F. Swenberg; Anchuan Wang; Nitin K. Ingle; Manish Hemkar; Jose Antonio Marin

Archive | 2013

PROVIDING GROUP V AND GROUP VI OVER PRESSURE FOR THERMAL TREATMENT OF COMPOUND SEMICONDUCTOR THIN FILMS

Swaminathan Srinivasan

Archive | 2013

Epitaxial chamber with customizable flow injection

Shu-Kwan Lau; Zhepeng Cong; Mehmet Tugrul Samir; Zhiyuan Ye; David K. Carlson; Xuebin Li; Errol Antonio C. Sanchez; Swaminathan Srinivasan

Archive | 2011

Methods to adjust threshold voltage in semiconductor devices

Michael G. Ward; Igor Peidous; Sunny Chiang; Yen B. Ta; Andrew Darlak; Peter I. Porshnev; Swaminathan Srinivasan

Archive | 2013

Apparatus and Process for Atomic Layer Deposition with Horizontal Laser

David Thompson; Pravin K. Narwankar; Swaminathan Srinivasan; Sukti Chatterjee; Abhilash J. Mayur; Kashif Maqsood

Archive | 2015

UTILIZATION OF ANGLED TRENCH FOR EFFECTIVE ASPECT RATIO TRAPPING OF DEFECTS IN STRAIN-RELAXED HETEROEPITAXY OF SEMICONDUCTOR FILMS

Swaminathan Srinivasan; Fareen Adeni Khaja; Errol Antonio C. Sanchez; Patrick M. Martin

Archive | 2014

Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing

Swaminathan Srinivasan; Atif Noori; David K. Carlson

Archive | 2014

Multizone control of lamps in a conical lamphead using pyrometers

Joseph M. Ranish; Paul Brillhart; Jose Antonio Marin; Satheesh Kuppurao; Swaminathan Srinivasan; Mehmet Tugrul Samir

Archive | 2014

ENABLING HIGH ACTIVATION OF DOPANTS IN INDIUM-ALUMINUM-GALIUM-NITRIDE MATERIAL SYSTEM USING HOT IMPLANTATION AND NANOSECOND ANNEALING

Swaminathan Srinivasan; Fareen Adeni Khaja

Archive | 2015

LAYERWISE HEATING, LINEWISE HEATING, PLASMA HEATING AND MULTIPLE FEED MATERIALS IN ADDITIVE MANUFACTURING

Christopher A. Rowland; Anantha K. Subramani; Kasiraman Krishnan; Kartik Ramaswamy; Thomas Brezoczky; Swaminathan Srinivasan; Jennifer Y. Sun; Simon Yavelberg; Srinivas D. Nemani; Nag B. Patibandla; Hou T. Ng

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Anantha K. Subramani

Applied Materials

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Christopher A. Rowland

Applied Materials

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Hou T. Ng

Applied Materials

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Jennifer Y. Sun

Applied Materials

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Kartik Ramaswamy

Applied Materials

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Kasiraman Krishnan

Applied Materials

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Simon Yavelberg

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Thomas Brezoczky

Applied Materials

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Errol Antonio C. Sanchez

Applied Materials

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