Stefan Xalter | Researchain

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Featured researches published by Stefan Xalter.

Archive | 2001

Optical element deformation system

Frank Melzer; Michael Mühlbeyer; Bernhard Gellrich; Franz Sorg; Stefan Xalter; Thomas Ittner

Archive | 2014

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

Stefan Xalter; Yim-Bun Patrick Kwan; András G. Major; Manfred Maul; Johannes Eisenmenger; Damian Fiolka; Jan Horn; Markus Deguenther; Florian Bach; Michael Patra; Johannes Wangler; Michael Layh

Archive | 2009

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

Guido Limbach; Franz Sorg; Armin Schoeppach; Ulrich Weber; Ulrich Loering; Dirk Hellweg; Peter Meyer; Stefan Xalter; Jens Kugler; Bernhard Gellrich; Stefan Hembacher; Bernhard Geuppert; Aksel Goehnermeier

Archive | 2000

Optical arrangement having improved temperature distribution within an optical element

Werner Müller-Rissmann; Hubert Holderer; Rudolf von Bünau; Christian Wagner; Jochen Becker; Stefan Xalter; Wolfgang Hummel

Archive | 2002

System for damping oscillations

Franz Sorg; Stefan Xalter; Frank Melzer; Bernhard Gellrich; Michael Muehlbeyer

Archive | 2003

Diaphragm changing device

Hermann Bieg; Thomas Bischoff; Uy-Liem Nguyen; Stefan Xalter; Marcus Will; Yim-Bun Patrick Kwan; Michael Muehlbeyer

Archive | 2001

Oscillation damping system

Franz Sorg; Stefan Xalter; Michael Muehlbeyer; Bernhard Gellrich; Frank Melzer; Thomas Ittner

Archive | 2009

Optical system for semiconductor lithography

Frank Melzer; Yim Bun Patrick Kwan; Stefan Xalter; Damian Fiolka

Archive | 2000

Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system

Werner Müller-Rissmann; Hubert Holderer; Rudolf von Bünau; Christian Wagner; Jochen Becker; Stefan Xalter; Wolfgang Hummel

Archive | 2001

Optical element deformation system, specific deformation system for optical element, and specific deformation method of optical element

Bernhard Gellrich; Thomas Ittner; Frank Melzer; Michael Mühlbeyer; Franz Sorg; Stefan Xalter; クサルターシュテファン; イットナートーマス; メルツァーフランク; ゾルグフランツ; ゲルリヒベルンハルト; ミュールベイアーミヒャエル

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