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Su Chen Fan

IBM

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Publication

Featured researches published by Su Chen Fan.

Archive | 2014

Formation of the dielectric cap layer for a replacement gate structure

Ruilong Xie; Balasubramanian Pranatharthi Haran; David V. Horak; Su Chen Fan

Archive | 2010

Method of forming replacement metal gate with borderless contact and structure thereof

David V. Horak; Su Chen Fan; Theodorus E. Standaert

Archive | 2013

BORDERLESS CONTACT FOR ULTRA-THIN BODY DEVICES

Su Chen Fan; Balasubramanian S. Haran; David V. Horak

Archive | 2013

MULTI-GATE FIELD-EFFECT TRANSISTORS WITH VARIABLE FIN HEIGHTS

Hsueh-Chung Chen; Su Chen Fan; Theodorus E. Standaert; Chun-Chen Yeh

Archive | 2014

Methods of forming a combined gate and source/drain contact structure and the resulting device

Ruilong Xie; Andre P. Labonte; Su Chen Fan; Balasubramanian S. Haran

Archive | 2012

Method for forming a self-aligned contact opening by a lateral etch

Ruilong Xie; Su Chen Fan; Pranatharthiharan Balasubramanian; David Vaclav Horak; Ponoth Shom

Archive | 2010

Method of forming self-aligned local interconnect and structure formed thereby

Charles W. Koburger; David V. Horak; Shom Pomoth; Chih-Chao Yang; Su Chen Fan; Sivananda K. Kanakasabapathy

Archive | 2014

STI region for small fin pitch in FinFET devices

Hsueh-Chung Chen; Su Chen Fan; Chiahsun Tseng; Chun-Chen Yeh

Archive | 2017

Gate tie-down enablement with inner spacer

Su Chen Fan; Andre P. Labonte; Lars W. Liebmann; Sanjay Mehta

Archive | 2016

Stable multiple threshold voltage devices on replacement metal gate cmos devices

Su Chen Fan; Sivananda K. Kanakasabapathy; Injo Ok; Tenko Yamashita

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Collaboration

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Theodorus E. Standaert

IBM

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David Vaclav Horak

IBM

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David V. Horak

IBM

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Ruilong Xie

IBM

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Sivananda K. Kanakasabapathy

IBM

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Andre P. Labonte

IBM

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Hsueh-Chung Chen

IBM

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Injo Ok

IBM

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Balasubramanian S. Haran

IBM

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Chih-Chao Yang

IBM

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