Is this you? Create Your Porfile
Avatar

Sum-Yee Betty Tang

Applied Materials

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Sum-Yee Betty Tang is active.

Explore More

Publication

Featured researches published by Sum-Yee Betty Tang.

Archive | 2005

Liquid precursors for the CVD deposition of amorphous carbon films

Martin Jay Seamons; Wendy H. Yeh; Sudha Rathi; Deenesh Padhi; Andy Luan; Sum-Yee Betty Tang; Priya Kulkarni; Visweswaren Sivaramakrishnan; Bok Hoen Kim; Hichem M'Saad; Yuxiang May Wang; Michael Chiu Kwan

Archive | 2006

Enhancement of remote plasma source clean for dielectric films

Thomas Nowak; Kang Sub Yim; Sum-Yee Betty Tang; Kwangduk Douglas Lee; Vu Ngoc Tran Nguyen; Dennis Singleton; Martin Jay Seamons; Karthik Janakiraman; Ganesh Balasubramanian; Mohamed Ayoub; Wendy H. Yeh; Alexandros T. Demos; Hichem M'Saad

Archive | 2010

Pecvd multi-step processing with continuous plasma

Martin Jay Seamons; Sum-Yee Betty Tang; Michael H. Lin; Patrick Reilly; Sudha Rathi

Archive | 2004

Stress-tuned, single-layer silicon nitride film

Keebum Jung; Sum-Yee Betty Tang; Martin Jay Seamons; Reza Arghavani; Eller Y. Juco

Archive | 2010

Graded arc for high na and immersion lithography

Wendy H. Yeh; Martin Jay Seamons; Matthew Spuller; Sum-Yee Betty Tang; Kwangduk Douglas Lee; Sudha Rathi

Archive | 2013

Fluorocarbon coating having low refractive index

Sum-Yee Betty Tang; Martin Jay Seamons

Archive | 2005

A stress-tuned, single-layer silicon nitride film and method of deposition therefore

Keebum Jung; Sum-Yee Betty Tang; Martin Jay Seamons; Reza Arghavani; Eller Y. Juco

Archive | 2013

LOW REFRACTIVE INDEX COATING DEPOSITED BY REMOTE PLASMA CVD

Sum-Yee Betty Tang; Martin Jay Seamons; Kiran V. Thadani; Abhijit Basu Mallick

Archive | 2013

Revêtement à faible indice de réfraction déposé par un dépôt en phase vapeur (cvd) par plasma distant

Sum-Yee Betty Tang; Martin Jay Seamons; Kiran V. Thadani; Abhijit Basu Mallick

Archive | 2006

Amélioration de sources distantes de plasma pour nettoyer les films diélectriques

Thomas Nowak; Kang Sub Yim; Sum-Yee Betty Tang; Kwangduk Douglas Lee; Vu Ngoc Tran Nguyen; Dennis Singleton; Martin Jay Seamons; Karthik Janakiraman; Ganesh Balasubramanian; Mohamed Ayoub; Wendy H. Yeh; Alexandros T. Demos; Hichem M'Saad

Explore More

Collaboration

Dive into the Sum-Yee Betty Tang's collaboration.

Top Co-Authors
Avatar

Martin Jay Seamons

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Wendy H. Yeh

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Sudha Rathi

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Hichem M'Saad

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Kwangduk Douglas Lee

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Alexandros T. Demos

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Andy Luan

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Bok Hoen Kim

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Deenesh Padhi

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Dennis Singleton

Applied Materials

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge