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Tobias Letz

Advanced Micro Devices

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Publication

Featured researches published by Tobias Letz.

Archive | 2009

Semiconductor device comprising an in-chip active heat transfer system

Tobias Letz

Archive | 2008

SEMICONDUCTOR DEVICE HAVING A LOCALLY ENHANCED ELECTROMIGRATION RESISTANCE IN AN INTERCONNECT STRUCTURE

Frank Feustel; Tobias Letz; Thomas Werner

Archive | 2007

METHOD AND TEST STRUCTURE FOR ESTIMATING ELECTROMIGRATION EFFECTS CAUSED BY POROUS BARRIER MATERIALS

Frank Feustel; Christine Hau-Riege; Tobias Letz

Archive | 2006

METHOD FOR REMOVING A PASSIVATION LAYER PRIOR TO DEPOSITING A BARRIER LAYER IN A COPPER METALLIZATION LAYER

Holger Schuehrer; Tobias Letz; Frank Koschinsky

Archive | 2010

Enhanced electromigration performance of copper lines in metallization systems of semiconductor devices by surface alloying

Frank Feustel; Tobias Letz; Axel Preusse

Archive | 2007

Verfahren zum Entfernen einer Passivierungsschicht vor dem Abscheiden einer Barrierenschicht in einer Kupfer-metallisierungsschicht

Holger Schührer; Tobias Letz; Frank Koschinsky

Archive | 2007

Technique for forming a passivation layer without a terminal metal

Tobias Letz; Matthias Lehr; Joerg Hohage; Frank Kuechenmeister

Archive | 2007

A SEMICONDUCTOR HAVING A COPPER-BASED METALLIZATION STACK WITH A LAST ALUMINUM METAL LINE LAYER

Matthias Lehr; Matthias Schaller; Tobias Letz

Archive | 2007

Verfahren und Teststruktur zum Abschätzen von Elektromigrationseffekten, die durch poröse Barrierenmaterialien hervorgerufen werden

Frank Feustel; Christine Hau-Riege; Tobias Letz

Archive | 2007

Verfahren zum Reduzieren der Kontaminierung durch Vorsehen einer Ätzstoppschicht am Substratrand

Ralf Richter; Tobias Letz; Holger Schuehrer

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Collaboration

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Frank Feustel

Advanced Micro Devices

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Holger Schuehrer

Advanced Micro Devices

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Matthias Lehr

Advanced Micro Devices

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Holger Schührer

Advanced Micro Devices

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Axel Preusse

GlobalFoundries

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Frank Koschinsky

GlobalFoundries

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Christine Hau-Riege

Advanced Micro Devices

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Frank Koschinsky

GlobalFoundries

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Frank Kuechenmeister

GlobalFoundries

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Joerg Hohage

GlobalFoundries

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