Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Frank Koschinsky is active.

Publication


Featured researches published by Frank Koschinsky.


Archive | 2002

Metallization process sequence for a barrier metal layer

Volker Kahlert; Frank Koschinsky; Peter Hübler


Archive | 2002

Void formation monitoring in a damascene process

Thomas Werner; Peter Hübler; Frank Koschinsky


Archive | 2006

Semiconductor device comprising copper-based contact plug and a method of forming the same

Kai Frohberg; Frank Koschinsky; Katja Huy


Archive | 2008

Multi-step deposition control

Roland Jaeger; Frank Wagenbreth; Frank Koschinsky


Archive | 2005

Method for cleaning the surface of a substrate

Frank Koschinsky; Volker Kahlert; Peter Huebler


Archive | 2001

Void formation monitoring method for damascene structures, involves forming and cutting test structures then inspecting cross-sectional view and investigating void formation in damascene structure

Thomas Werner; Peter Huebler; Frank Koschinsky


Archive | 2007

METHOD OF TESTING AN INTEGRITY OF A MATERIAL LAYER IN A SEMICONDUCTOR STRUCTURE

Moritz Andreas Meyer; Eckhard Langer; Frank Koschinsky


Archive | 2006

METHOD FOR REMOVING A PASSIVATION LAYER PRIOR TO DEPOSITING A BARRIER LAYER IN A COPPER METALLIZATION LAYER

Holger Schuehrer; Tobias Letz; Frank Koschinsky


Archive | 2005

Process to manufacture a semiconductor component with aperture cut through a dielectric material stack

Frank Koschinsky; Matthias Lehr; Markus Nopper


Archive | 2002

Interface void monitoring in a damascene process

Eckhard Langer; Frank Koschinsky; Volker Kahlert; Peter Hübler

Collaboration


Dive into the Frank Koschinsky's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar

Katja Huy

Advanced Micro Devices

View shared research outputs
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge