Tomohiro Iwano
Hitachi
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Publication
Featured researches published by Tomohiro Iwano.
Proceedings of International Conference on Planarization/CMP Technology 2014 | 2014
Takaaki Tanaka; Hisataka Minami; Toshiaki Akutsu; Tomohiro Iwano; Takahiro Hidaka; Takashi Shinoda; Haruaki Sakurai; Shigeru Nobe
We report recent progress in a novel cerium hydroxide polishing slurry with particle size of about 5 nm nano size cerium hydroxide (NSC) abrasive. NSC has succeeded in omitting particles over 1 μm, and in reducing scratches to 1/30 of those with calcined ceria slurry. Even though, NSC maintains oxide removal rate similar to conventional ceria. Mixing NSC with the specific additives brought out tunable polishing of SiO2, SiN, and poly-Si.
Archive | 2013
Toshiaki Akutsu; Hisataka Minami; Tomohiro Iwano; Koji Fujisaki
Archive | 2012
Hisataka Minami; Keisuke Inoue; Chisato Kikkawa; Yutaka Nomura; Tomohiro Iwano
Archive | 2015
Toshiaki Akutsu; Hisataka Minami; Tomohiro Iwano; Koji Fujisaki
Archive | 2013
Tomohiro Iwano; Takenori Narita; Daisuke Ryuzaki
Archive | 2011
Yosuke Hoshi; Tomohiro Iwano; Takenori Narita; Daisuke Ryuzaki; 友洋 岩野; 武憲 成田; 陽介 星; 大介 龍崎
Archive | 2013
Tomohiro Iwano; 友洋 岩野; Hisataka Minami; 久貴 南; Toshiaki Akutsu; 利明 阿久津; Koji Fujisaki; 耕司 藤崎
Archive | 2013
Tomohiro Iwano; Hisataka Minami; Hirotaka Akimoto
Archive | 2013
Hisataka Minami; Toshiaki Akutsu; Tomohiro Iwano; Koji Fujisaki
Archive | 2016
Hisataka Minami; Tomohiro Iwano; Toshiaki Akutsu
