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Norman Nakashima

Applied Materials

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Publication

Featured researches published by Norman Nakashima.

Archive | 2001

Gas delivery apparatus and method for atomic layer deposition

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima

Archive | 2002

Gas delivery apparatus for atomic layer deposition

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima; Mei Chang

Archive | 2007

Ampoule with a thermally conductive coating

Schubert S. Chu; Christophe Marcadal; Seshadri Ganguli; Norman Nakashima; Dien-Yeh Wu

Archive | 2009

Chemical delivery apparatus for cvd or ald

Norman Nakashima; Christophe Marcadal; Seshadri Ganguli; Paul F. Ma; Schubert S. Chu

Archive | 2006

INTEGRATION PROCESS OF TUNGSTEN ATOMIC LAYER DEPOSITION FOR METALLIZATION APPLICATION

Ling Chen; Hua Chung; Sean M. Seutter; Michael Yang; Ming Xi; Vincent Ku; Dien-Yeh Wu; Alan Ouye; Norman Nakashima; Barry Chin; Hong Zhang

Archive | 2007

Atomic layer deposition process

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima

Archive | 2008

In-situ chamber treatment and deposition process

Paul F. Ma; Joseph F. Aubuchon; Mei Chang; Steven H. Kim; Dien-Yeh Wu; Norman Nakashima; Mark Johnson; Roja Palakodeti

Archive | 2009

Traitement de chambre in situ et processus de dépôt

Paul F. Ma; Joseph F. Aubuchon; Mei Chang; Steven H. Kim; Dien-Yeh Wu; Norman Nakashima; Mark Johnson; Roja Palakodeti

Archive | 2007

appareil de DÉPÔT chimique pour cvd ou ald

Norman Nakashima; Christophe Marcadal; Seshadri Ganguli; Paul F. Ma; Schubert S. Chu

Archive | 2002

Atomic-layer-deposited tantalum nitride and alpha-phase tantalum as barrier layers for copper metallization

Ling Chen; Hua Chung; Sean M. Seutter; Michael X. Yang; Ming Yi; Vincent Ku; Dien-Yeh Wu; Alan Ouye; Norman Nakashima; Barry Chin; Hong Zhang

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Collaboration

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Dien-Yeh Wu

Applied Materials

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Alan Ouye

Applied Materials

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Hua Chung

Applied Materials

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Ling Chen

Applied Materials

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Vincent Ku

Applied Materials

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Mei Chang

Applied Materials

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Paul F. Ma

Applied Materials

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Christophe Marcadal

Applied Materials

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Hong Zhang

Applied Materials

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Schubert S. Chu

Applied Materials

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