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Dive into the research topics where Dien-Yeh Wu is active.

Publication


Featured researches published by Dien-Yeh Wu.


Archive | 2001

Gas delivery apparatus and method for atomic layer deposition

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima


Archive | 2002

Gas delivery apparatus for atomic layer deposition

Ling Chen; Vincent Ku; Dien-Yeh Wu; Hua Chung; Alan Ouye; Norman Nakashima; Mei Chang


Archive | 2006

Apparatus and process for plasma-enhanced atomic layer deposition

Paul F. Ma; Kavita Shah; Dien-Yeh Wu; Seshadri Ganguli; Christophe Marcadal; Frederick C. Wu; Schubert S. Chu


Archive | 2005

Method and apparatus of generating PDMAT precursor

Ling Chen; Vincent Ku; Hua Chung; Christophe Marcadal; Seshadri Ganguli; Jenny Lin; Dien-Yeh Wu; Alan Ouye; Mei Chang


Archive | 2002

Method and apparatus for gas temperature control in a semiconductor processing system

Vincent Ku; Ling Chen; Dien-Yeh Wu; Alan Ouye; Irena Wysok


Archive | 2006

Valve design and configuration for fast delivery system

Vincent Ku; Ling Chen; Dien-Yeh Wu


Archive | 2003

APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING

Ling Chen; Vincent Ku; Mei Chang; Dien-Yeh Wu; Hua Chung


Archive | 2007

ATOMIC LAYER DEPOSITION CHAMBER AND COMPONENTS

Dien-Yeh Wu; Schubert S. Chu; Paul F. Ma; Jeffrey Tobin


Archive | 2007

Ampoule with a thermally conductive coating

Schubert S. Chu; Christophe Marcadal; Seshadri Ganguli; Norman Nakashima; Dien-Yeh Wu


Archive | 2004

Method and apparatus for generating a precursor for a semiconductor processing system

Ling Chen; Vincent Ku; Hua Chung; Christophe Marcadal; Seshadri Ganguli; Jenny Lin; Dien-Yeh Wu; Alan Ouye; Mei Chang

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