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Wilhelm Kegel

Infineon Technologies

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Publication

Featured researches published by Wilhelm Kegel.

Archive | 2002

Method for increasing the capacitance in a storage trench

Alexander Ruff; Wilhelm Kegel; Wolfram Karcher; Martin Schrems

Archive | 2001

Method for increasing the capacitance in a storage trench and trench capacitor having increased capacitance

Alexander Ruf; Wilhelm Kegel; Wolfram Karcher; Martin Schrems

Archive | 2003

Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates

Olaf Storbeck; Wilhelm Kegel; Jens-Uwe Sachse; Michael Stadtmüller; Regina Hayn; Erwin Schoer; Georg Roters; Steffen Frigge

Archive | 2003

Device and method for thermally treating semiconductor wafers

Georg Roters; Steffen Frigge; Sing Pin Tay; Yao Zhi Hu; Regina Hayn; Jens-Uwe Sachse; Erwin Schoer; Wilhelm Kegel

International symposium on advanced short-time thermal processing for Si-based CMOS devices | 2003

Selective oxidation of tungsten-gate stacks in high-volume DRAM production

Georg Roters; Regina Hayn; Wilhelm Kegel; Olaf Storbeck; Steffen Frigge; Gerd Feldmeyer; Hans Joachim Meyer; Erwin Schroer

Archive | 2002

Method for minimizing tungsten oxide evaporation during selective sidewall oxidation of tungsten-silicon gates

Steffen Frigge; Wilhelm Kegel; Jens-Uwe Sachse; Michael Stadtmüller; Regina Hayn; Georg Roters; Erwin Schoer; Olaf Storbeck

Archive | 2000

Method for improving thermal process steps

Wilhelm Kegel; Thomas Schuster

Archive | 2004

Semiconductor structure manufacturing method especially for deep trench memory circuits made with sub-100 nm technology, whereby doped silicon is deposited over the trench structure using on over-conforming separation method

Andreas Dietel; Matthias Förster; Jochen Geidl; Moritz Haupt; Wilhelm Kegel; Michael Stadtmüller; Olaf Storbeck

Archive | 2004

Device and method for thermal processing on semiconductor wafer

Roters Georg; Frigge Steffen; Tay Sing-Pin; Hu Yao-Zhi; Hayn Regina; Jens Uwe Sachse; Erwin Schoer; Wilhelm Kegel

Archive | 2004

Überkonformes Herstellungsverfahren für eine Halbleiterstruktur

Andreas Dietel; Matthias Förster; Jochen Geidl; Moritz Haupt; Wilhelm Kegel; Michael Stadtmüller; Olaf Storbeck

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Erwin Schoer

Infineon Technologies

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Georg Roters

Infineon Technologies

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Regina Hayn

Qimonda

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Steffen Frigge

Infineon Technologies

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Olaf Storbeck

Qimonda

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Jens-Uwe Sachse

Infineon Technologies

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Martin Schrems

Infineon Technologies

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Wolfram Karcher

Infineon Technologies

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Alexander Ruf

Infineon Technologies

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Michael Stadtmüller

Infineon Technologies

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