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Fritz C. Redeker

Lam Research

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Publication

Featured researches published by Fritz C. Redeker.

Archive | 2004

Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer

Michael Ravkin; Michael G. R. Smith; John M. de Larios; Fritz C. Redeker; Mikhail Korolik; Christian DiPietro

Archive | 2003

Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces

John M. de Larios; Mike Ravkin; Carl Woods; Fritz C. Redeker; James P. Garcia

Archive | 2006

Processes and Systems for Engineering a Barrier Surface for Copper Deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Hyungsuk Alexander Yoon; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2003

Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same

Katrina Mikhaylichenko; Fritz C. Redeker

Archive | 2004

Apparatuses and methods for cleaning a substrate

John M. de Larios; Aleksander Owczarz; Alan M. Schoepp; Fritz C. Redeker

Archive | 2004

Method and Apparatus for Cleaning Semiconductor Wafers Using Compressed and/or Pressurized Foams, Bubbles, and/or Liquids

John M. de Larios; Mike Ravkin; Jeffrey Farber; Mikhail Korolik; Fritz C. Redeker; Aleksander Owczarz

Archive | 2007

Apparatus and method for pre and post treatment of atomic layer deposition

Hyungsuk Alexander Yoon; Mikhail Korolik; Fritz C. Redeker; John M. Boyd; Yezdi Dordi

Archive | 2007

Methods of post-contact back end of line through-hole via integration

John M. Boyd; Fritz C. Redeker; Yezdi Dordi; Hyungsuk Alexander Yoon; Shijian Li

Archive | 2005

Method for removing material from semiconductor wafer and apparatus for performing the same

Mikhail Korolik; Michael Ravkin; John M. Delarios; Fritz C. Redeker; John M. Boyd

Archive | 2006

Processes and systems for engineering a silicon-type surface for selective metal deposition to form a metal silicide

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Johan Vertommen; Fritz C. Redeker; William Thie; Arthur M. Howald

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John M. Boyd

Lam Research

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Yezdi Dordi

Lam Research

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Mikhail Korolik

Lam Research

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Hyungsuk Alexander Yoon

Lam Research

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John M. de Larios

Lam Research

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Michael Ravkin

Lam Research

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William Thie

Lam Research

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Katrina Mikhaylichenko

Lam Research

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Erik M. Freer

Lam Research

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Tiruchirapalli Arunagiri

Lam Research

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