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William Thie

Lam Research

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Publication

Featured researches published by William Thie.

Archive | 2006

Processes and Systems for Engineering a Barrier Surface for Copper Deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Hyungsuk Alexander Yoon; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2006

Processes and systems for engineering a silicon-type surface for selective metal deposition to form a metal silicide

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Johan Vertommen; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2007

Electroless plating method and apparatus

William Thie; John M. Boyd; Yezdi Dordi; Fritz C. Redeker

Archive | 2007

Plating solutions for electroless deposition of copper

Yezdi Dordi; William Thie; Algirdas Vaskelis; Eugenijus Norkus; Jane Jaciauskiene; Aldona Jagminiene

Archive | 2006

System and method for forming patterned copper lines through electroless copper plating

Alan Lee; Andrew D. Bailey; William Thie; Yunsang Kim; Yezdi Dordi

Archive | 2003

Method and apparatus for megasonic cleaning with reflected acoustic waves

John M. Boyd; Fred C. Redeker; Randolph E. Treur; William Thie

Archive | 2008

Post-deposition cleaning methods and formulations for substrates with cap layers

Artur Kolics; Shijian Li; Tiruchirapalli Arunagiri; William Thie

Archive | 2006

Processes and systems for engineering a copper surface for selective metal deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2007

Self assembled monolayer for improving adhesion between copper and barrier layer

Praveen Nalla; William Thie; John M. Boyd; Tiruchirapalli Arunagiri; Hyungsuk Alexander Yoon; Fritz C. Redeker; Yezdi Dordi

Archive | 2006

Apparatus for the removal of a metal oxide from a substrate and methods therefor

Hyungsuk Alexander Yoon; William Thie; Yezdi Dordi; Andrew D. Bailey

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Collaboration

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Yezdi Dordi

Lam Research

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John M. Boyd

Lam Research

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Tiruchirapalli Arunagiri

Lam Research

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Fritz C. Redeker

Lam Research

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Hyungsuk Alexander Yoon

Lam Research

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Arthur M. Howald

Lam Research

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Alan M. Schoepp

Lam Research

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John Parks

Lam Research

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Fred C. Redeker

Lam Research

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Aleksander Owczarz

Lam Research

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