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Zhisong Huang

Lam Research

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Publication

Featured researches published by Zhisong Huang.

Archive | 2010

Gas distribution system having fast gas switching capabilities

Zhisong Huang; Jose Tong Sam; Eric Lenz; Rajinder Dhindsa; Reza Sadjadi

Archive | 2003

Method for forming a dual-damascene structure

Zhisong Huang; Lumin Li; Reza Sadjadi

Archive | 2011

Fast gas switching plasma processing apparatus

S. M. Reza Sadjadi; Zhisong Huang; Jose Tong Sam; Eric Lenz; Rajinder Dhindsa

Archive | 2008

Method for Resist Strip in Presence of Low K Dielectric Material and Apparatus for Performing the Same

Zhisong Huang; Reza Sadjadi

Archive | 2008

Apparatus for providing device with gaps for capacitance reduction

S. M. Reza Sadjadi; Zhisong Huang

Archive | 2014

GAS DISTRIBUTION SYSTEM HAVING FAST GAS SWITCHING CAPABILITIES, AND PLASMA PROCESSING APPARATUS

Zhisong Huang; Jose Tong Sam; Lentz Eric; Rajinder Dhindsa; Sadjadi Reza

Archive | 2007

Appareil de traitement à plasma de basculement rapide de gaz

S. M. Reza Sadjadi; Zhisong Huang; Jose Tong Sam; Eric Lenz; Rajinder Dhindsa

Archive | 2006

Structure de photoresist stabilisee pour processus d'attaque

S. M. Reza Sadjadi; Eric Hudson; Peter Cirigliano; Jisoo Kim; Zhisong Huang

Archive | 2006

Correction des profils verticaux

S. M. Reza Sadjadi; Peter Cirigliano; Jisoo Kim; Zhisong Huang; Eric Hudson

Archive | 2005

Reduction de dimensions critiques de motifs d'un masque de gravure

Zhisong Huang; S. M. Reza Sadjadi; Jeffrey Marks

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Collaboration

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S. M. Reza Sadjadi

Lam Research

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Jose Tong Sam

Lam Research

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Rajinder Dhindsa

Lam Research

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Eric Lenz

Lam Research

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Reza Sadjadi

Lam Research

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Eric Hudson

Lam Research

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Jisoo Kim

Lam Research

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Peter Cirigliano

Lam Research

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Jeffrey Marks

Lam Research

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Lumin Li

Lam Research

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