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Zsolt Nenyei

AST

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Publication

Featured researches published by Zsolt Nenyei.

Archive | 1996

Apparatus and method for rapid thermal processing

Guenter Kaltenbrunner; Zsolt Nenyei; Helmut Sommer

Archive | 1995

Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems

Zsolt Nenyei; Andreas Tillmann; Heinrich Walk

Archive | 1995

Method and apparatus for rapid thermal processing

Guenter Kaltenbrunner; Thomas Knarr; Zsolt Nenyei

Archive | 1997

Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems

Zsolt Nenyei; Heinrich Walk; Michael Maurer; Thomas Knarr

Archive | 1992

Method and apparatus for a rapid thermal processing of delicate components

Zsolt Nenyei; Thomas Knarr; Heinrich Walk

Archive | 1992

Rapid thermal processing of sensitive devices - using heat source programme control to avoid defects in e.g. semiconductor devices

Zsolt Nenyei; Thomas Knarr; Heinrich Walk

Archive | 1995

Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus

Zsolt Nenyei; Helmut Merkle; Andreas Tillmann

Archive | 1994

Verfahren und Vorrichtung für die optische Schnellheizbehandlung empfindlicher elektronischer Bauelemente, insbesondere Halbleiterbauelemente

Guenter Kaltenbrunner; Thomas Knarr; Zsolt Nenyei

Archive | 2010

Vorrichtung und Verfahren zum Erzeugen dielektrischer Schichten im Mikrowellenplasma

Wilfried Lerch; Alexander Gschwandtner; Zsolt Nenyei; Thomas Theiler

Archive | 1997

Method for rapid thermal processing (RTP) of silicon substrates

Zsolt Nenyei; Wilfried Lerch; Helmut Sommer

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Collaboration

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Alexander Gschwandtner

Siemens

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Thomas Theiler

Mattson Technology

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Wilfried Lerch

Mattson Technology

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Jürgen Niess

Centrotherm Photovoltaics

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Conor Patrick O'carroll

Mattson Technology

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Daniel J. Devine

Mattson Technology

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Igor Fidelman

Mattson Technology

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Manfred Falter

Mattson Technology

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Patrick Schmid

Mattson Technology

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Paul Janis Timans

Mattson Technology

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