Is this you? Create Your Porfile
Avatar

Dirk Schaffer

Carl Zeiss AG

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Dirk Schaffer is active.

Explore More

Publication

Featured researches published by Dirk Schaffer.

Archive | 2006

Optical assembly, e.g. for use in photolithography, has rotation symmetrical rim for holding optical components, rotation symmetrical rim holder with at least one first and second part; first rim holder part encloses rim circumference

Knut Hage; Dirk Schaffer

Archive | 2008

Device for the low-deformation replaceable mounting of an optical element

Franz Sorg; Andreas Wurmbrand; Thomas Petasch; Dirk Schaffer; Siegfried Wahl

Archive | 2004

Low-deformation support device of an optical element

Dirk Schaffer; Andreas Wurmbrand; Thomas Schletterer

Archive | 2012

OPTICAL ELEMENT FOR UV OR EUV LITHOGRAPHY

Johannes Lippert; Dirk Schaffer

Archive | 2010

Optical element module with minimized parasitic loads

Jens Kugler; Ulrich Weber; Dirk Schaffer

Archive | 2007

Optical element unit and method of supporting an optical element

Dirk Schaffer; Willi Heintel; Hagen Federau; Joachim Hartjes; Harald Kirchner

Archive | 2012

OPTICAL ARRANGEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Dirk Schaffer; Stefan Hembacher; Jens Kugler

Archive | 2012

Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage

Dirk Schaffer; Stefan Hembacher; Jens Kugler

Archive | 2015

Bearing element and system for mounting an optical element

Jens Prochnau; Dirk Schaffer

Archive | 2014

Lithography apparatus and method for producing a mirror arrangement

Dirk Schaffer; Wilfried Clauss; Hin Yiu Anthony Chung

Explore More

Collaboration

Dive into the Dirk Schaffer's collaboration.

Top Co-Authors
Avatar

Jens Prochnau

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Andreas Wurmbrand

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Hin Yiu Anthony Chung

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Jens Kugler

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Bernhard Gellrich

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Johannes Lippert

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Stefan Hembacher

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Markus Kern

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Marwene Nefzi

Carl Zeiss AG

View shared research outputs
Top Co-Authors
Avatar

Wilfried Clauss

Carl Zeiss AG

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge