Armin Schöppach | Researchain

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Featured researches published by Armin Schöppach.

Archive | 2005

Objective comprising at least one optical element

Johannes Rau; Armin Schöppach; Ulrich Weber

Archive | 2009

Gravitationskompensation für optische Elemente in Projektionsbelichtungsanlagen

Jürgen Fischer; Norbert Mühlberger; Matthias Orth; Thorsten Rassel; Armin Schöppach

Archive | 2007

Projection exposure system e.g. step-and-scan system, for semiconductor lithography, has optical element e.g. lens, manipulated by actuator of manipulator e.g. Alvarez-element, where manipulator is designed in exchangeable manner

Bernhard Gellrich; Bernhard Geuppert; Aksel Göhnermeier; Dirk Hellweg; Stefan Hembacher; Jens Kugler; Guido Limbach; Ulrich Loering; Peter Meyer; Armin Schöppach; Franz Sorg; Ulrich Weber; Stefan Xalter

Archive | 2008

Projection lens for micro lithography, has multiple lenses with local optical axis, where one lens is assigned to manipulator with actuators, and input force or input torque is attained by former actuators

Sascha Bleidistel; Andreas Frommeyer; Toralf Gruner; Artur Högele; Wolfgang Hummel; Thomas Schletterer; Armin Schöppach; Bärbel Schwaer; Jochen Schwaer

Archive | 2005

Mirror`s imaging characteristics variation device for projection exposure system, has actuators formed such that changeable forces are introduced in mirror by variation in temperature, where forces lead to deformation of mirror surface

Albrecht Hof; Günter Maul; Armin Schöppach

Archive | 2009

Gravitation compensation for optical elements in projection lighting systems

Norbert Mühlberger; Thorsten Rassel; Armin Schöppach; Jürgen Fischer; Matthias Orth

Archive | 2010

Projektionsbelichtungsanlage für die Mikrolithographie zur Herstellung von Halbleiterbauelementen

Jürgen Fischer; Armin Schöppach; Matthias Orth; Norbert Mühlberger; Thorsten Rassel

Archive | 2009

Projection exposure system for manufacturing semiconductor component i.e. computer chip, has changing unit for changing optical assembly that is exchangeably formed, and bearing unit reducing deformations of optical element caused by holder

Armin Schöppach; Stefan Hembacher; Guido Limbach; Thomas Petasch; Yim-Bun-Patrick Kwan; Viktor Kulitsky; Christian Brusch; Ulrich Weber; Stefan Xalter; Martin Vogt; Bruno Schweizer

Archive | 2011

Optische Anordnung in einem optischen System, insbesondere einer Beleuchtungseinrichtung

Hubert Holderer; Johannes Lippert; Armin Schöppach

Archive | 2006

Method for connecting an optical element with a fitting on at least one connecting site used in semiconductor lithography comprises indirectly or directly positioning the element and the fitting during connection using a support element

Günter Albrecht; Ulrich Bingel; Claudia Ekstein; Gennady Fedosenko; Leonid Gorkhover; Gerd Klose; Johannes Rau; Armin Schöppach; Hans-Jochaim Trefz; Michael Widmann; Stefan Wiesner

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