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Johannes Rau

Carl Zeiss AG

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Publication

Featured researches published by Johannes Rau.

Archive | 2008

Optical element unit

Armin Schoeppach; Johannes Rau

Archive | 2005

Objective comprising at least one optical element

Johannes Rau; Armin Schöppach; Ulrich Weber

Archive | 2005

Objective with at least one optical element

Johannes Rau; Armin Schoeppach; Ulrich Weber

Archive | 2002

Arrangement for securing a mount of an optical element

Johannes Rau

Archive | 2006

Device for mounting an optical element, particularly a lens in an objective

Johannes Rau

Archive | 2006

Optical system i.e. projection lens, for use in microlithography, has housing including two individual housing parts provided with optical unit, where flushing gas e.g. neon, flows via inlet opening into housing

Stephan Back; Cornelia Bühler; Julian Kaller; Alexander Kohl; Thomas Petasch; Johannes Rau

Archive | 2006

Method for connecting an optical element with a fitting on at least one connecting site used in semiconductor lithography comprises indirectly or directly positioning the element and the fitting during connection using a support element

Günter Albrecht; Ulrich Bingel; Claudia Ekstein; Gennady Fedosenko; Leonid Gorkhover; Gerd Klose; Johannes Rau; Armin Schöppach; Hans-Jochaim Trefz; Michael Widmann; Stefan Wiesner

Archive | 2004

Flange assembly of an optical system

Johannes Rau; Martin Mahlmann

Archive | 2003

Device for receiving an optical module in an imaging unit

Johannes Rau; Armin Schoeppach; Bernhard Geuppert

Archive | 2006

Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly

Johannes Rau; Josef Distl; Armin Schoeppach; Hubert Holderer

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Collaboration

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Armin Schoeppach

Carl Zeiss AG

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Armin Schöppach

Carl Zeiss AG

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Hubert Holderer

Carl Zeiss AG

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Alexander Kohl

Carl Zeiss AG

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Claudia Ekstein

Carl Zeiss AG

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Gennady Fedosenko

Carl Zeiss AG

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Leonid Gorkhover

Carl Zeiss AG

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Michael Widmann

Carl Zeiss AG

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Stefan Wiesner

Carl Zeiss AG

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Ulrich Bingel

Carl Zeiss AG

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