Gregory E. Menk

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Publication

Featured researches published by Gregory E. Menk.

advanced semiconductor manufacturing conference | 2010

Gregory E. Menk; Sivakumar Dhandapani; Charles C. Garretson; Shou-sung Chang; Jason Garcheung Fung; Stan D. Tsai

A new pad conditioning arm design enables the use of closed-loop control (CLC) to improve conditioning performance throughout the life of a pad and disk pair. Measured pad conditioner torque is used to monitor and control the conditioning and polish processes in situ and in real time. The CLC system maintains process performance throughout pad life by adjusting the conditioner down force to compensate for process drift, such as the loss of diamond aggressiveness as the disk ages.

Archive | 2003

Gopalakrishna B. Prabhu; Thomas H. Osterheld; Garlen C. Leung; Adam H. Zhong; Peter McReynolds; Yi-Yung Tao; Gregory E. Menk; Vasanth N. Mohan; Christopher Heung-Gyun Lee

Archive | 2002

Halbert Tam; Gregory E. Menk

Archive | 2007

Gregory E. Menk; Peter McReynolds; Erik S. Rondum; Anand N. Iyer; Gopalakrishna B. Prabhu; Garlen C. Leung

Archive | 2007

Steven M. Zuniga; Peter McReynolds; Erik S. Rondum; Benjamin A. Bonner; Henry H. Au; Gregory E. Menk; Gopalakrishna B. Prabhu; Anand N. Iyer; Garlen C. Leung

Archive | 2011

Sivakumar Dhandapani; Jun Qian; Christopher D. Cocca; Jason Garcheung Fung; Shou-sung Chang; Charles C. Garretson; Gregory E. Menk; Stan D. Tsai

Archive | 2009

Sivakumar Dhandapani; Stan D. Tsai; Daxin Mao; Sameer Deshpande; Shou-sung Chang; Gregory E. Menk; Charles C. Garretson; Jason Garcheung Fung; Christopher D. Cocca; Hung Chih Chen

Archive | 2008