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Chiukin Lai

Applied Materials

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Publication

Featured researches published by Chiukin Lai.

Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2002

Method of TiSiN deposition using a chemical vapor deposition (CVD) process

Jing-Pei Chou; Chien-Teh Kao; Chiukin Lai; Roderick Craig Mosely; Mei Chang

Archive | 2005

In-situ dry clean chamber for front end of line production

Mei Chang; Jing-Pei Connie Chou; Joel M. Huston; Chien-Teh Kao; Chiukin Lai; Xinliang Lu; See-Eng Phan; Son Trinh; Sal Umotoy; Wie W. Wang; Xiaoxiong John Yuan; Chan Yuu; ダブリュ． ワン ウィー; ウモトイ サル; トリン サン; ファン シー−エン; （ジョン） ユアン シャオション; エム． ヒューストン ジョエル; （コニー） チョウ ジン−ペイ; ルー シンリン; （スティーヴ）エヌ ライ チウキン; カオ チェン−テ; チャン メイ; チャン ユー

Archive | 2004

Monitoring a flow distribution of an energized gas

See-Eng Phan; Ralf Hofmann; Tong Zhang; Yehuda Demayo; Sreekrishnan Sankaranarayanan; Chiukin Lai

Archive | 2013

MULTI CHAMBER PROCESSING SYSTEM

Chien-Teh Kao; Jing-Pei Connie Chou; Chiukin Lai; Salvador P. Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Chambre in situ de nettoyage par voie sèche pour le traitement préalable des substrats

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

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Collaboration

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Chien-Teh Kao

Applied Materials

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Mei Chang

Applied Materials

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See-Eng Phan

Applied Materials

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Joel M. Huston

Applied Materials

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Son Trinh

Applied Materials

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Xinliang Lu

Applied Materials

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Jing-Pei Chou

Applied Materials

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Sal Umotoy

Applied Materials

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Xiaoxiong Yuan

Applied Materials

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Yu Chang

Applied Materials

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