Jing-Pei Chou | Researchain

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Featured researches published by Jing-Pei Chou.

Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber

David T. Or; Jing-Pei Chou; See-Eng Phan; Xinliang Lu; Chien-Teh Kao; Mei Chang

Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2002

Method of TiSiN deposition using a chemical vapor deposition (CVD) process

Jing-Pei Chou; Chien-Teh Kao; Chiukin Lai; Roderick Craig Mosely; Mei Chang

Archive | 2001

Method for forming aluminum lines over aluminum-filled vias in a semiconductor substrate

Ted Guo; Jing-Pei Chou; Liang-Yuh Chen; Roderick Craig Mosely

Archive | 2005

Chambre in situ de nettoyage par voie sèche pour le traitement préalable des substrats

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2005

In-situ Trockenreinigungskammer für Frontend-Zeilenherstellung

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

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