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Sal Umotoy

Applied Materials

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Publication

Featured researches published by Sal Umotoy.

Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2001

Processing chamber with multi-layer brazed lid

Sal Umotoy; Be Van Vo; Son Trinh

Archive | 2005

In-situ dry clean chamber for front end of line production

Mei Chang; Jing-Pei Connie Chou; Joel M. Huston; Chien-Teh Kao; Chiukin Lai; Xinliang Lu; See-Eng Phan; Son Trinh; Sal Umotoy; Wie W. Wang; Xiaoxiong John Yuan; Chan Yuu; ダブリュ． ワン ウィー; ウモトイ サル; トリン サン; ファン シー−エン; （ジョン） ユアン シャオション; エム． ヒューストン ジョエル; （コニー） チョウ ジン−ペイ; ルー シンリン; （スティーヴ）エヌ ライ チウキン; カオ チェン−テ; チャン メイ; チャン ユー

Archive | 2001

Ceramic substrate support body

Anzhong Chang; Chun-Rai Ray Lawrence; Anh N. Nguyen; Ron Rose; Hongbee Teoh; Sal Umotoy; Xiaoxiong Yuan; エヌ ングイェン アン; チャン アンゾーン; ウモトイ サル; ユアン シアオシオン; テオー ホンビー; チュン−ライ レイ ローレンス; ローズ ロン

Archive | 2001

Substrate support for a semiconductor processing chamber

Anzhong Chang; Lei Lawrence Chung-Lai; Anh N. Nguyen; Ron Rose; Hongbee Teoh; Sal Umotoy; Xiaoxiong Yuan

Archive | 2005

Chambre in situ de nettoyage par voie sèche pour le traitement préalable des substrats

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

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Collaboration

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Xiaoxiong Yuan

Applied Materials

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Son Trinh

Applied Materials

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Chien-Teh Kao

Applied Materials

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Chiukin Lai

Applied Materials

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Joel M. Huston

Applied Materials

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Mei Chang

Applied Materials

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See-Eng Phan

Applied Materials

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Xinliang Lu

Applied Materials

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Jing-Pei Chou

Applied Materials

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Yu Chang

Applied Materials

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