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John M. de Larios

Lam Research

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Publication

Featured researches published by John M. de Larios.

Archive | 2004

Apparatus and method for providing a confined liquid for immersion lithography

David Hemker; Fred C. Redeker; John M. Boyd; John M. de Larios; Michael Ravkin; Mikhail Korolik

Archive | 2004

Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer

Michael Ravkin; Michael G. R. Smith; John M. de Larios; Fritz C. Redeker; Mikhail Korolik; Christian DiPietro

Archive | 2003

Methods and systems for processing a substrate using a dynamic liquid meniscus

James P. Garcia; John M. de Larios; Michael Ravkin; Fred C. Redeker; Carl Woods

Archive | 2000

Capillary proximity heads for single wafer cleaning and drying

John M. de Larios; Mike Ravkin; Glen Travis; Jim Keller; Wilbur C. Krusell

Archive | 2002

Methods for wafer proximity cleaning and drying

John M. de Larios; Mike Ravkin; Glen Travis; Jim Keller; Wilbur C. Krusell

Archive | 2003

Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces

John M. de Larios; Mike Ravkin; Carl Woods; Fritz C. Redeker; James P. Garcia

Archive | 2003

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

Mike Ravkin; John M. Boyd; Yezdi Dordi; Fred C. Redeker; John M. de Larios

Archive | 2003

Method and apparatus for cleaning a substrate using megasonic power

John M. Boyd; Mike Ravkin; Fred C. Redeker; John M. de Larios

Archive | 2000

Single wafer residue, thin film removal and clean

Wilbur C. Krusell; John M. de Larios; Mike Ravkin

Archive | 2003

Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus

Carl Woods; James P. Garcia; John M. de Larios

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Collaboration

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Mikhail Korolik

Lam Research

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Michael Ravkin

Lam Research

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Mike Ravkin

Lam Research

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Fred C. Redeker

Lam Research

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Erik M. Freer

Lam Research

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Fritz C. Redeker

Lam Research

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Katrina Mikhaylichenko

Lam Research

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Carl Woods

Lam Research

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James P. Garcia

Lam Research

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John M. Boyd

Lam Research

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