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Dive into the research topics where George Jonathan Kluth is active.

Publication


Featured researches published by George Jonathan Kluth.


Archive | 2002

Method of manufacturing a semiconductor device with supersaturated source/drain extensions and metal silicide contacts

George Jonathan Kluth; Qi Xiang


Archive | 2000

Process for forming fully silicided gates

Qi Xiang; Ercan Adem; Jacques Bertrand; Paul R. Besser; Matthew S. Buynoski; John Clayton Foster; Paul L. King; George Jonathan Kluth; Minh Van Ngo; Eric N. Paton; Christy Mei-Chu Woo


Archive | 2004

Single anneal for dopant activation and silicide formation

George Jonathan Kluth


Archive | 2003

METHOD FOR INTEGRATING METALS HAVING DIFFERENT WORK FUNCTIONS TO FOM CMOS GATES HAVING A HIGH-K GATE DIELECTRIC AND RELATED STRUCTURE

Qi Xiang; Huicai Zhong; Jung-Suk Goo; Allison Holbrook; Joong S. Jeon; George Jonathan Kluth


Archive | 2000

Process for optimizing pocket implant profile by RTA implant annealing for a non-volatile semiconductor device

George Jonathan Kluth; Stephen Keetai Park; Arvind Halliyal; David K. Foote


Archive | 2000

Double silicide formation in polysicon gate without silicide in source/drain extensions

Christy Mei-Chu Woo; George Jonathan Kluth; Qi Xiang


Archive | 2009

Integrated circuit having long and short channel metal gate devices and method of manufacture

Richard J. Carter; Michael J. Hargrove; George Jonathan Kluth; John G. Pellerin


Archive | 2002

Fully nickel silicided metal gate with shallow junction formed

Qi Xiang; Christy Mei-Chu Woo; George Jonathan Kluth


Archive | 2009

METAL OXIDE SEMICONDUCTOR DEVICES HAVING BURIED GATE CHANNELS AND METHODS FOR FABRICATING THE SAME

Michael J. Hargrove; Richard J. Carter; Ying H. Tsang; George Jonathan Kluth; Kisik Choi


Archive | 2001

Dual layer silicide formation using a titanium barrier to reduce surface roughness at silicide/junction interface

Jacques Bertrand; George Jonathan Kluth; Minh Van Ngo; Christy Mei-Chu Woo

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Qi Xiang

Advanced Micro Devices

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