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Hung Chen

Applied Materials

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Publication

Featured researches published by Hung Chen.

Archive | 1997

Carrier head with a flexible membrane for a chemical mechanical polishing system

Steven M. Zuniga; Manoocher Birang; Hung Chen; Sen-Hou Ko

Archive | 1998

Carrier head for chemical mechanical polishing a substrate

Steven M. Zuniga; Hung Chen; Manoocher Birang

Archive | 1997

Carrier head with a substrate detection mechanism for a chemical mechanical polishing system

Boris Govzman; Steven M. Zuniga; Hung Chen; Sasson Somekh

Archive | 2000

Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus

Hung Chen; Steven M. Zuniga

Archive | 1998

Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus

Hung Chen; Steven M. Zuniga

Archive | 2000

Carrier head for chemical mechanical polishing

Steven M. Zuniga; Hung Chen

Archive | 2001

CMP polishing pad

Robert D. Tolles; Steven T. Mear; Gopalakrishna B. Prabhu; Steven M. Zuniga; Hung Chen

Archive | 1998

Carrier head with edge control for chemical mechanical polishing

Steven M. Zuniga; Hung Chen; Gopalakrishna B. Prabhu

Archive | 1998

Carrier head with a flexible membrane for chemical mechanical polishing

Hung Chen; Steven M. Zuniga

Archive | 2000

Method of chemical mechanical polishing with edge control

Steven M. Zuniga; Hung Chen; Gopalakrishna B. Prabhu

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Steven M. Zuniga

Applied Materials

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Sen-Hou Ko

Applied Materials

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Manoocher Birang

Applied Materials

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Gopalakrishna B. Prabhu

Applied Materials

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Sasson Somekh

Applied Materials

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Birang Manoocher

Applied Materials

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Boris Govzman

Applied Materials

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Robert D. Tolles

Applied Materials

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Steven T. Mear

Applied Materials

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