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Dive into the research topics where Peter McReynolds is active.

Publication


Featured researches published by Peter McReynolds.


Archive | 2003

Polishing processes for shallow trench isolation substrates

Gopalakrishna B. Prabhu; Thomas H. Osterheld; Garlen C. Leung; Adam H. Zhong; Peter McReynolds; Yi-Yung Tao; Gregory E. Menk; Vasanth N. Mohan; Christopher Heung-Gyun Lee


Archive | 2007

Polishing article with integrated window stripe

Gregory E. Menk; Peter McReynolds; Erik S. Rondum; Anand N. Iyer; Gopalakrishna B. Prabhu; Garlen C. Leung


Archive | 2007

Polishing apparatus with grooved subpad

Steven M. Zuniga; Peter McReynolds; Erik S. Rondum; Benjamin A. Bonner; Henry H. Au; Gregory E. Menk; Gopalakrishna B. Prabhu; Anand N. Iyer; Garlen C. Leung


Archive | 2007

SELECTIVE CHEMISTRY FOR FIXED ABRASIVE CMP

Gregory E. Menk; Robert L. Jackson; Garlen C. Leung; Gopalakrishna B. Prabhu; Peter McReynolds; Anand N. Iyer


Archive | 2007

Polishing system with spiral-grooved subpad

Erik S. Rondum; Peter McReynolds; Benjamin A. Bonner; Gregory E. Menk; Gopalakrishna B. Prabhu; Garlen C. Leung; Anand N. Iyer


Archive | 2007

Materials for chemical mechanical polishing

Benjamin A. Bonner; Peter McReynolds; Gregory E. Menk; Anand N. Iyer; Gopalakrishna B. Prabhu; Erik S. Rondum; Robert L. Jackson; Garlen C. Leung


Archive | 2006

Smart polishing media assembly for planarizing substrates

Peter McReynolds; Gregory E. Menk; Benjamin A. Bonner; Gopalakrishna B. Prabhu; Erik S. Rondum; Garlen C. Leung; Anand N. Iyer


Archive | 2011

Real-time monitoring of retaining ring thickness and lifetime

Peter McReynolds; Eric S. Rondum; Garlen C. Leung; Adam H. Zhong; Gregory E. Menk; Gopalakrishna B. Prabhu; Thomas H. Osterheld


Archive | 2003

Platen with patterned surface for chemical mechanical polishing

Gopalakrishna B. Prabhu; Erik S. Rondum; Peter McReynolds; Thomas H. Osterheld; Garlen C. Leung; Jack Arluck; Adam H. Zhong; Gregory E. Menk


Archive | 2007

Polishing article with window stripe

Gregory E. Menk; Peter McReynolds; Erik S. Rondum; Gopalakrishna B. Prabhu; Anand N. Iyer; Garlen C. Leung

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