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Sagehashi Masayoshi

Shin-Etsu Chemical

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Publication

Featured researches published by Sagehashi Masayoshi.

Archive | 2009

Sulfonium salt, resist material and method for forming pattern

Sagehashi Masayoshi; Osawa Yoichi; Hasegawa Koji; Kanao Go; Kobayashi Tomohiro

Archive | 2012

NITROGEN-CONTAINING MONOMER, POLYMER, RESIST MATERIAL, AND PATTERNING PROCESS

Sagehashi Masayoshi; Hatakeyama Jun; Watanabe Takeshi; Kobayashi Tomohiro

Archive | 2013

RESIST COMPOSITION AND METHOD FOR FORMING PATTERN

Hatakeyama Jun; Ohashi Masaki; Sagehashi Masayoshi

Archive | 2013

Photoacid generator, chemically amplified resist material, and patterning process

Ohashi Masaki; Kobayashi Tomohiro; Sagehashi Masayoshi

Archive | 2013

MONOMER, POLYMER COMPOUND, RESIST MATERIAL, AND PATTERN FORMATION METHOD

Sagehashi Masayoshi; Fukushima Masahiro; Hasegawa Koji; Adachi Teppei; Katayama Kazuhiro; Hatakeyama Jun

Archive | 2011

ACID-CLEAVABLE ESTER MONOMER HAVING SPIRO RING STRUCTURE, POLYMER COMPOUND, RESIST MATERIAL AND PATTERN-FORMING METHOD

Kanao Go; Kobayashi Tomohiro; Sagehashi Masayoshi; Watanabe Takeshi; Hasegawa Koji; Tachibana Seiichiro

Archive | 2016

PATTERN FORMING METHOD AND SHRINK AGENT

Hatakeyama Jun; Katayama Kazuhiro; Hasegawa Koji; Sagehashi Masayoshi

Archive | 2014

PATTERN FORMING METHOD, RESIST COMPOSITION, POLYMERIC COMPOUND AND MONOMER

Hasegawa Koji; Sagehashi Masayoshi; Katayama Kazuhiro; Kobayashi Tomohiro

Archive | 2013

CHEMICALLY AMPLIFIED POSITIVE RESIST MATERIAL FOR ArF IMMERSION EXPOSURE, AND METHOD FOR FORMING PATTERN

Osawa Yoichi; Sagehashi Masayoshi; Hasegawa Koji; Sasami Takeshi

Archive | 2012

POLYMER, CHEMICALLY AMPLIFIED RESIST MATERIAL, AND PATTERNING METHOD USING THE CHEMICALLY AMPLIFIED RESIST MATERIAL

Sagehashi Masayoshi; Osawa Yoichi; Hasegawa Koji; Kobayashi Tomohiro

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Collaboration

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Hasegawa Koji

Shin-Etsu Chemical

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Hatakeyama Jun

Shin-Etsu Chemical

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Katayama Kazuhiro

Shin-Etsu Chemical

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Kobayashi Tomohiro

Shin-Etsu Chemical

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Ohashi Masaki

Shin-Etsu Chemical

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Fukushima Masahiro

Shin-Etsu Chemical

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Iio Masashi

Shin-Etsu Chemical

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Takemura Katsuya

Shin-Etsu Chemical

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Urano Hiroyuki

Shin-Etsu Chemical

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Tachibana Seiichiro

Shin-Etsu Chemical

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