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Hongwen Yan

IBM

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Publication

Featured researches published by Hongwen Yan.

Archive | 2001

Method to controllably form notched polysilicon gate structures

Jeffrey Douglas Brown; Richard S. Wise; Hongwen Yan; Qingyun Yang; Chienfan Yu

Archive | 2003

Method for reducing line edge roughness of oxide material using chemical oxide removal

Joyce C. Liu; Wesley C. Natzle; Richard S. Wise; Hongwen Yan; Bidan Zhang

Archive | 2010

CMOS structure and method for fabrication thereof using multiple crystallographic orientations and gate materials

Tze-Chiang Chen; Meikei Ieong; Rajarao Jammy; M. Khare; Chun-Yung Sung; Richard S. Wise; Hongwen Yan; Ying Zhang

Archive | 2008

RESIDUE FREE PATTERNED LAYER FORMATION METHOD APPLICABLE TO CMOS STRUCTURES

Michael P. Chudzik; Bruce B. Doris; William K. Henson; Hongwen Yan; Ying Zhang

Archive | 2003

Etch selectivity enhancement for tunable etch resistant anti-reflective layer

Katherina Babich; Scott Halle; David V. Horak; Arpan P. Mahorowala; Wesley C. Natzle; Dirk Pfeiffer; Hongwen Yan

Archive | 2010

Semiconductor transistors having high-K gate dielectric layers and metal gate electrodes

James W. Adkisson; Michael P. Chudzik; Jeffrey P. Gambino; Hongwen Yan

Archive | 2004

Reduced dielectric constant spacer materials integration for high speed logic gates

Michael P. Belyansky; Joyce C. Liu; Hsing Jen Wann; Richard S. Wise; Hongwen Yan

Archive | 2005

Apparatus and method for shielding a wafer from charged particles during plasma etching

Hongwen Yan; Brian L. Ji; Siddhartha Panda; Richard S. Wise; Bomy A. Chen

Archive | 2011

Method of Removing High-K Dielectric Layer on Sidewalls of Gate Structure

Ying Zhang; Qingyun Yang; Hongwen Yan

Archive | 2000

Hard mask process to prevent surface roughness for selective dielectric etching

P. Jamison; Tina Wagner; Richard S. Wise; Hongwen Yan

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Richard S. Wise

IBM

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Michael P. Chudzik

IBM

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Ying Zhang

IBM

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Bomy A. Chen

IBM

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Naim Moumen

IBM

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Bruce B. Doris

IBM

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Joyce C. Liu

IBM

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William K. Henson

IBM

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Brian L. Ji

IBM

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Huiming Bu

IBM

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