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Hui-Lin Chang

TSMC

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Publication

Featured researches published by Hui-Lin Chang.

Thin Solid Films | 2004

Mechanical property analyses of porous low-dielectric-constant films for stability evaluation of multilevel-interconnect structures

Shou-Yi Chang; Hui-Lin Chang; Yung-Cheng Lu; Syun-Ming Jang; Su-Jien Lin; Mong-Song Liang

Archive | 2003

Method for ultra low-K dielectric deposition

Chung-Chi Ko; Yung-Cheng Lu; Tien-I Bao; Hui-Lin Chang; Syun-Ming Jang

Archive | 2004

Method for improving a semiconductor device delamination resistance

Pi-Tsung Chen; Keng-Chu Lin; Hui-Lin Chang; Lih-Ping Li; Tien-I Bao; Yung-Cheng Lu; Syun-Ming Jang

Archive | 2015

Interconnect Structure for Semiconductor Devices

Hui-Lin Chang; Hung Chun Tsai; Yung-Cheng Lu; Syun-Ming Jang

Archive | 2009

Synergy Effect of Alloying Materials in Interconnect Structures

Hui-Lin Chang; Yung-Cheng Lu; Syun-Ming Jang

Archive | 2007

Interconnect Structures for Semiconductor Devices

Hui-Lin Chang; Hung Chun Tsai; Yung-Cheng Lu; Syun-Ming Jang

Archive | 2006

Carbon and nitrogen based cap materials for metal hard mask scheme

Hui-Lin Chang; Yung-Cheng Lu; Tien-I Bao

Archive | 2007

Selective Formation of Boron-Containing Metal Cap Pre-layer

Hui-Lin Chang; Yung-Cheng Lu; Syun-Ming Jang

Archive | 2007

Self-aligned dielectric cap

Hui-Lin Chang; Yung-Cheng Lu; Syun-Ming Jang

Archive | 2007

Method for enhancing adhesion between layers in BEOL fabrication

Chung-Chi Ko; Lih-Ping Li; Yung-Cheng Lu; Hui-Lin Chang; Chih-Hsien Lin

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Yung-Cheng Lu

TSMC

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Syun-Ming Jang

TSMC

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Chung-Chi Ko

TSMC

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Lih-Ping Li

TSMC

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Tien-I Bao

TSMC

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Chih-Hsien Lin

TSMC

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Hung Chun Tsai

TSMC

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Mong-Song Liang

TSMC

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Keng-Chu Lin

TSMC

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Pi-Tsung Chen

TSMC

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