Tien-I Bao
TSMC
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Publication
Featured researches published by Tien-I Bao.
Proceedings of SPIE | 2014
Shy-Jay Lin; Tien-I Bao; C. W. Lu; Shih-Chi Wang; Tsung-Chih Chien; Jaw-Jung Shin; Burn Jeng Lin; Mark A. McCord; Alan D. Brodie; Allen Carroll; Luca Grella
KLA-Tencor is currently developing Reflective Electron Beam Lithography (REBL), targeted as a production worthy multiple electron beam tool for next generation high volume lithography. The Digital Pattern Generator (DPG) integrated with CMOS and MEMS lenslets is a critical part of REBL. Previously, KLA-Tencor reported on progress towards a REBL tool for maskless lithography below the 10 nm technology node. However, the MEMS lenslet structure suffered from charging up during writing, requiring the usage of a charge drain coating. Since then, the TSMC multiple e-beam team and the KLA-Tencor REBL team have worked together to further develop the DPG for direct write lithography. In this paper, we introduce a hollow-structure MEMS lenslet array that inherently prevents charging during writing, and preliminary verification results are also presented.
Archive | 2015
Ru-Gun Liu; Cheng-Hsiung Tsai; Chung-Ju Lee; Chih-Ming Lai; Chia-Ying Lee; Jyu-Horng Shieh; Ken-Hsien Hsieh; Ming-Feng Shieh; Shau-Lin Shue; Shih-Ming Chang; Tien-I Bao; Tsai-Sheng Gau
Archive | 2009
Ching-Yu Lo; Hung-Jung Tu; Hai-Ching Chen; Tien-I Bao; Wen-Chih Chiou; Chen-Hua Yu
Archive | 2015
Hsin-Chieh Yao; Chung-Ju Lee; Yung-Hsu Wu; Tien-I Bao; Shau-Lin Shue
Archive | 2015
Cheng-Hsiung Tsai; Yung-Hsu Wu; Tsung-Min Huang; Chung-Ju Lee; Tien-I Bao; Shau-Lin Shue
Archive | 2014
Sunil Kumar Singh; Chung-Ju Lee; Tien-I Bao
Archive | 2017
Chung-Ju Lee; Hsin-Chieh Yao; Shau-Lin Shue; Tien-I Bao; Yung-Hsu Wu
Archive | 2011
Chen-Hua Yu; Hai-Ching Chen; Tien-I Bao
Archive | 2013
Yu-Sheng Chang; Chung-Ju Lee; Cheng-Hsiung Tsai; Yung-Hsu Wu; Hsiang-Huan Lee; Hai-Ching Chen; Ming-Feng Shieh; Tien-I Bao; Ru-Gun Liu; Tsai-Sheng Gau; Shau-Lin Shue
Archive | 2013
Hsin-Yen Huang; Chi-Lin Teng; Hai-Ching Chen; Tien-I Bao